Multi-cavity optical sensing and thermopile infrared sensing system
The present invention discloses a multi-cavity optical sensing and thermopile infrared sensing system, which comprises an optical sensing part, a dielectric layer, a plurality of optical cavities, and a plurality of thermocouples. The dielectric layer covers on the top of the optical sensing part. The optical cavities are formed by a plurality of metal reflectors inside the dielectric layer. The thermocouples are laterally disposed near the bottom of the dielectric layer. In addition, a low temperature region is formed in an area which is the overlapping of vertical projections of such thermocouples and the optical sensing part; a high temperature region is formed by the overlapping of vertical projections of such thermocouples, but without the overlaying which belongs to the vertical projection of the optical sensing part. Therefore, the system can sense the ambient light brightness, color conditions and human blackbody infrared signals within the range of 8-12 micrometers wavelength.
1. A multi-cavity optical sensing and thermopile infrared sensing system, comprising:
an optical sensing part;
a dielectric layer covering on the top of the optical sensing part;
a first optical cavity formed by a first metal reflective layer and a second metal reflective layer inside the dielectric layer;
a first thermocouple laterally disposed inside and near the bottom of the dielectric layer; and
a second thermocouple laterally disposed inside and near the bottom of the dielectric layer wherein the second thermocouple is disposed parallel to and above the first thermocouple;
wherein, in the dielectric layer, a low temperature region is formed in an area which is the overlapping of vertical projections of the first thermocouple, the second thermocouple and the optical sensing part; a high temperature region is formed by the overlapping of vertical projections of the first thermocouple and the second thermocouple, but without the overlaying which belongs to the vertical projection of the optical sensing part.
2. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , further comprising:
a third thermocouple laterally disposed relatively to the first thermocouple near the bottom of the dielectric layer; and
a fourth thermocouple laterally disposed relatively to the second thermocouple and above the third thermocouple in parallel;
wherein, in the dielectric layer, a low temperature region is formed in an area which is the overlapping of vertical projections of the first thermocouple, the second thermocouple, the third thermocouple, the fourth thermocouple and the optical sensing part; a high temperature region is formed by the overlapping of vertical projections of the first thermocouple, the second thermocouple, the third thermocouple, and the fourth thermocouple, but without the overlaying which belongs to the vertical projection of the optical sensing part.
3. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , wherein the optical sensing part further comprises:
a base body;
an epitaxial layer formed on a top end of the base body; and
a plurality of N+ electrode sections formed on the epitaxial layer thereof.
4. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , further comprising:
a second optical cavity formed in the dielectric layer by the second metal reflective layer and a third metal reflective layer, wherein the second optical cavity is set nearby the first optical cavity in a stepped pattern.
5. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 4 , wherein the first optical cavity and the second optical cavity comprise different spectrum response.
6. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , further comprising:
a thermoelectric conversion unit disposed between the high temperature section and the low temperature section to receive a high temperature and a low temperature and further to converse the temperature difference into a potential difference.
7. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , wherein the dielectric layer comprises a nitride silicon (Si3N4) layer, a silicon dioxide (SiO2) layer, or the mixture of both.
8. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , wherein the first thermocouple and the third thermocouple are N-type thermocouples.
9. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , wherein the second thermocouple and the fourth thermocouple are P-type thermocouples.
10. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , wherein the metal reflective layers comprise aluminum (Al), gold (Au), or silver (Ag).
11. The multi-cavity optical sensing and thermopile infrared sensing system as defined in claim 1 , wherein the multi-cavity optical sensing and thermopile infrared sensing system is completed by the technology of complementary metal oxide semiconductor (CMOS), bipolar transistor, or bi-complementary metal oxide semiconductor (BiCMOS).