IP Library Granted Patent US 8,436,337
Granted Patent B2
US 8,436,337 · App. 12/777,194 · Granted May 7, 2013

Amorphous multi-component metallic thin films for electronic devices

Inventors: E. William Cowell, III (Corvallis, OR); John F. Wager (Corvallis, OR); Brady J. Gibbons (Corvallis, OR); Douglas A. Keszler (Corvallis, OR)
Assignee: The State of Oregon Acting By and Through The State Board of Higher Education on Behalf of Oregon State Unitiversity
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Quick Facts
Patent No.
US 8,436,337
App. No.
12/777,194
Granted
May 7, 2013
Kind
B2
Abstract

An electronic structure comprising: (a) a first metal layer; (b) a second metal layer; (c) and at least one insulator layer located between the first metal layer and the second metal layer, wherein at least one of the metal layers comprises an amorphous multi-component metallic film. In certain embodiments, the construct is a metal-insulator-metal (MIM) diode.

Claims (27)

1. An electronic device structure comprising:

(a) a first metal layer;

(b) a second metal layer; and

(c) at least one insulator layer located between the first metal layer and the second metal layer,

wherein at least one of the metal layers comprises an amorphous multi-component metallic film and wherein the amorphous multi-component metallic film is selected from ZrCuAlNi or TiAl.

2. An electronic device structure comprising:

(a) a first metal layer;

(b) a second metal layer; and

(c) at least one insulator layer located between the first metal layer and the second metal layer,

wherein at least one of the metal layers comprises an amorphous multi-component metallic film and wherein the first metal layer comprises an amorphous multi-component metallic film comprising ZrCuAlNi.

3. An electronic device structure comprising:

(a) a first metal layer;

(b) a second metal layer; and

(c) at least one insulator layer located between the first metal layer and the second metal layer,

wherein at least one of the metal layers comprises an amorphous multi-component metallic film and wherein the first metal layer comprises the amorphous multi-component metallic film and the second metal layer is not an amorphous multi-component metallic film.

4. The structure of claim 3 , wherein the first metal layer and the insulator layer form a first metal layer/insulator layer interface and the first metal layer/insulator layer interface enables Fowler-Nordheim tunneling when a predetermined electric field is applied to the diode structure.

5. An electronic device structure comprising:

(a) a first metal layer;

(b) a second metal layer; and

(c) at least one insulator layer located between the first metal layer and the second metal layer,

wherein at least one of the metal layers comprises an amorphous multi-component metallic film and wherein the first metal layer comprises an amorphous multi-component metallic film comprising TiAl.

6. The structure according to any one of claims 1 - 2 , wherein the structure is a metal-insulator-metal diode and the first metal layer is a first electrode and the second metal layer is a second electrode.

7. A method for making a metal-insulator-metal diode comprising:

forming a first electrode on a first substrate wherein the first electrode defines a first surface facing the first substrate and an opposing second surface;

forming an insulator layer on the second surface of the first electrode, wherein the insulator layer defines a first surface facing the first electrode and an opposing second surface; and

forming a second electrode on the second surface of the insulator layer,

wherein at least one of the electrodes comprises an amorphous multi-component metallic film and wherein the amorphous multi-component metallic film is selected from ZrCuAlNi or TiAl.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 25, 2012
From: COWELL, III., E. WILLIAM; WAGER, JOHN F.; KESZLER, DOUGLAS A.; GIBBONS, BRADY J.
To: THE STATE OF OREGON ACTING BY AND THROUGH THE STATE BOARD OF HIGHER EDUCATION ON BEHALF OF OREGON STATE UNIVERSITY
Reel/Frame 028270/0614 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNOR FROM DOUGALS A. KESZLER TO DOUGLAS A. KESZLER PREVIOUSLY RECORDED ON REEL 024620 FRAME 0204. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Aug 4, 2010
From: COWELL, E. WILLIAM, III; WAGER, JOHN F., III; GIBBONS, BRADY J.; KESZLER, DOUGLAS A.
To: STATE OF OREGON ACTING BY AND THROUGH THE STATE BOARD OF HIGHER EDUCATION ON BEHALF OF OREGON STATE UNIVERSITY
Reel/Frame 024787/0101 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 30, 2010
From: COWELL, E. WILLIAM, III; WAGER, JOHN F., III; GIBBONS, BRADY J.; KESZLER, DOUGALS A.
To: STATE OF OREGON ACTING BY AND THROUGH THE STATE BOARD OF HIGHER EDUCATION ON BEHALF OF OREGON STATE UNIVERSITY
Reel/Frame 024620/0204 →
Continuity (2)
Provisional Application 61216073 · May 12, 2009
Related Publication 20100289005A1 · Nov 18, 2010