Semiconductor device manufacturing method
A method for manufacturing a semiconductor device including a semiconductor substrate composed of silicon carbide, an upper surface electrode which contacts an upper surface of the substrate, and a lower surface electrode which contacts a lower surface of the substrate, the method including steps of: (a) forming an upper surface structure on the upper surface side of the substrate, and (b) forming a lower surface structure on the lower surface side of the substrate. The step (a) comprises steps of: (a1) depositing an upper surface electrode material layer on the upper surface of the substrate, the upper surface electrode material layer being a raw material layer of the upper surface electrode, and (a2) annealing the upper surface electrode material layer. The step (b) comprises steps of: (b1) depositing a lower surface electrode material layer on the lower surface of the substrate, the lower surface electrode material layer being a raw material layer of the lower surface electrode, and (b2) annealing the lower surface electrode material layer with a laser to make an ohmic contact between the lower surface electrode and the substrate.
1. A method for manufacturing a semiconductor device including a semiconductor substrate composed of silicon carbide, an upper surface electrode which contacts an upper surface of the substrate, and a lower surface electrode which contacts a lower surface of the substrate, the method comprising:
(a) forming an upper surface structure on the upper surface side of the substrate, and
(b) forming a lower surface structure on the lower surface side of the substrate after the (a),
wherein the forming (a) comprises:
(a1) forming an interlayer insulating film on the upper surface structure on the upper surface side of the substrate,
(a2) depositing an upper surface electrode material layer on the upper surface of the substrate, the upper surface electrode material layer being a raw material layer of the upper surface electrode, and
(a3) annealing the upper surface electrode material layer, and
the forming (b) comprises:
(b1) depositing a lower surface electrode material layer on the lower surface of the substrate, the lower surface electrode material layer being a raw material layer of the lower surface electrode, and
(b2) annealing the lower surface electrode material layer with a laser to make an ohmic contact between the lower surface electrode and the substrate
wherein the forming of the interlayer insulating film is formed before the depositing (a2).
2. The method according to claim 1 , wherein a temperature of annealing the upper surface electrode material layer in the annealing (a3) is lower than a temperature of annealing the lower surface electrode material layer with the laser in the annealing (b2).
3. The method according to claim 2 , wherein the forming (a) further comprises:
(a4) forming a surface cover film on the upper surface side of the substrate before the forming (b).
4. The method according to claim 3 , wherein
in the annealing (b2), the laser is an UV laser having a wavelength equal to or longer than 150 nm and equal to or shorter than 400 nm.
5. The method according to claim 4 , further comprising:
(c) thinning the substrate, wherein the thinning (c) is performed between the forming (a) and the forming (b).
6. The method according to claim 5 , wherein
in the thinning (c), the substrate is thinned to a thickness equal to or greater than 50 μm and equal to or smaller than 250 μm.
7. The method according to claim 6 , wherein
the upper surface electrode primarily includes at least one metal selected from the group consisting of Ti, Al, Mo, and Ni, and
the lower surface electrode primarily includes Ni.
8. The method according to claim 7 , wherein
in the annealing (b2), a temperature of annealing the lower surface electrode material layer with the laser is equal to or higher than 900 degrees Celsius.
9. The method according to claim 1 , wherein
in the annealing (b2), the laser is an UV laser having a wavelength equal to or longer than 150 nm and equal to or shorter than 400 nm.
10. The method according to claim 9 , wherein
a temperature of annealing the upper surface electrode material layer in the annealing (a2) is lower than a temperature of annealing the lower surface electrode material layer with the laser in the annealing (b2), and
in the annealing (b2), a temperature of annealing the lower surface electrode material layer with the laser is equal to or higher than 900 degrees Celsius.
11. The method according to claim 10 , wherein the upper surface electrode primarily includes at least one metal selected from the group consisting of Ti, Al, Mo, and Ni, and
the lower surface electrode primarily includes Ni.
12. The method according to claim 11 , further comprising:
(c) thinning the substrate to a thickness equal to or greater than 50 μm and equal to or smaller than 250 μm, wherein the thinning (c) is performed between the forming (a) and the forming (b).
13. The method according to claim 1 , further comprising:
(c) thinning the substrate, wherein the thinning (c) is performed between the forming (a) and the forming (b).
14. The method according to claim 13 , wherein
in the thinning (c), the substrate is thinned to a thickness equal to or greater than 50 μm and equal to or smaller than 250 μm.
15. The method according to claim 14 , wherein
the upper surface electrode primarily includes at least one metal selected from the group consisting of Ti, Al, Mo, and Ni,
the lower surface electrode primarily includes Ni,
a temperature of annealing the upper surface electrode material layer in the annealing (a3) is lower than a temperature of annealing the lower surface electrode material layer with the laser in the annealing (b2), and
in the annealing (b2), a temperature of annealing the lower surface electrode material layer with the laser is equal to or higher than 900 degrees Celsius.