Si etching method

1. A Si etching method comprising:

arranging a silicon substrate or a substrate having a silicon layer in a processing chamber;

generating a plasma of an etching gas in the processing chamber; and

etching the silicon substrate by the plasma,

wherein the etching gas is a gaseous mixture including a Br 2 gas and an AsCl 3 gas, the gaseous mixture not having hydrogen.

2. The method of claim 1 , wherein the etching gas further includes a rare gas.

3. The method of claim 1 , wherein the etching gas further includes an O 2 gas or a N 2 gas.

4. The method of claim 1 , wherein the etching gas further includes a fluorine compound gas.

5. The method of claim 4 , wherein the fluorine compound gas is one of a CF 4 gas, a SF 6 gas, and a NF 3 gas.

6. The method of claim 1 , wherein the silicon substrate is mounted on an electrode arranged in the processing chamber, and

a radio frequency power for attracting ions from the plasma is supplied to the electrode.

7. The method of claim 6 , wherein an additional electrode is disposed in the processing chamber in parallel with the electrode with a gap therebetween and an additional radio frequency power for discharging the etching gas is supplied to the electrode or the additional electrode.

8. The method of claim 1 , wherein a three-dimensional element body having a columnar or a rectangular parallelepiped shape is formed on a main surface of the silicon substrate by etching the silicon substrate.

9. The method of claim 1 , wherein the silicon layer of the substrate is etched to form a gate electrode of an insulated gate field effect transistor.

10. The method of claim 1 , wherein an etching mask for the etching includes an inorganic layer containing silicon.