Laser annealing method and apparatus
In the case of a lens array type homogenizer optical system, the incident angle and intensity of a laser beam 1 entering a large-sized lens (long-axis condenser lens 22 ) of a long-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while long-axis lens arrays 20 a and 20 b are reciprocated in a direction corresponding to a long axial direction of a linear beam (X-direction). Therefore, vertical stripes are significantly reduced. Further, the incident angle and intensity of a laser beam 1 entering a large-sized lens (projection lens 30 ) of a short-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while short-axis lens arrays 26 a and 26 b are reciprocated in a direction corresponding to a short axial direction of a linear beam (Y-direction). Therefore, horizontal stripes are significantly reduced.
1. A laser annealing apparatus that shapes a laser beam generated by laser oscillation in order to condense the laser beam into a linear beam on a surface of an object to be irradiated, relatively scans the object to be irradiated with the linear beam in a short axial direction of the linear beam so that irradiation of the laser beam overlaps each other, and anneals the surface of the object to be irradiated by laser irradiation, the laser annealing apparatus comprising:
(a) a long-axis waveguide that divides the laser beam into plural beams in a direction corresponding to a long axial direction of the linear beam;
(b) a long-axis focusing lens that introduces the laser beam into the long-axis waveguide;
(c) a long-axis condensing optical system that makes the plural beams condense each other in a long axial direction on the surface of the object to be irradiated; and
(d) a long-axis focusing lens moving apparatus that reciprocates a long-axis introducing lens in a direction corresponding to long axial direction of the linear beam during the laser irradiation,
wherein a moving width S of the reciprocation of the long-axis introducing lens is one third or more of a pitch P of stripes, and wherein the stripes appear visually when laser annealing is performed without the reciprocation.
2. The laser annealing apparatus according to claim 1 ,
wherein the polarization direction of the laser beam corresponds to S polarization with respect to the surface of the object to be irradiated.