Oxide semiconductors and thin film transistors comprising the same
Oxide semiconductors and thin film transistors (TFTs) including the same are provided. An oxide semiconductor includes Zn atoms and at least one of Ta and Y atoms added thereto. A thin film transistor (TFT) includes a channel including an oxide semiconductor including Zn atoms and at least one of Ta and Y atoms added thereto.
1. An oxide semiconductor comprising Zn and Ta, wherein the oxide semiconductor is amorphous, wherein the Zn is a Zn—In composite oxide including Ta, and wherein an at % ratio of Ta:In:Zn is in the range of about 1:2.1 to 18:1.6 to 14, inclusive.
2. The oxide semiconductor of claim 1 , wherein an at % ratio of Ta:In:Zn is in the range of about 1:2.1 to 9.5:1.6 to 6.4, inclusive.
3. The oxide semiconductor of claim 1 , wherein an at % ratio of Ta:In:Zn is in the range of about 1:5.7 to 9.5:4.8 to 6.4, inclusive.
4. The oxide semiconductor of claim 1 , further comprising:
at least one element selected from the group consisting of Groups I, II, III, IV, and V elements and elements belonging to the lanthanide series.
5. An oxide thin film transistor comprising:
a gate;
a channel formed to correspond to the gate, the channel comprising the oxide semiconductor of claim 1 ;
a gate insulating layer formed between the gate and the channel; and
a source and a drain contacting respective sides of the channel.
6. The oxide thin film transistor of claim 5 , wherein the oxide semiconductor has an at % ratio of Ta:In:Zn in the range of about 1:2.1 to 9.5:1.6 to 6.4, inclusive.
7. The oxide thin film transistor of claim 5 , wherein the oxide semiconductor has an at % ratio of Ta:In:Zn in the range of about 1:5.7 to 9.5:4.8 to 6.4, inclusive.
8. The oxide thin film transistor of claim 5 , wherein the oxide semiconductor further includes,
at least one element selected from the group consisting of Groups I, II, III, IV, and V elements and elements belonging to the lanthanide series.
9. The oxide semiconductor of claim 1 , wherein the Ta is ionically bonded to oxygen of the Zn—In composite oxide.
10. The oxide semiconductor of claim 1 , wherein the Ta is substituted for a portion of the Zn in the Zn—In composite oxide.
11. The oxide semiconductor of claim 1 , wherein the oxide semiconductor is an amorphous oxide semiconductor channel region.
12. An oxide semiconductor comprising Zn and Y, wherein the Zn is a Zn—In composite oxide, and wherein an atomic % ratio of Y:In:Zn is in the range of about 1:10 to 100:10 to 80, inclusive.
13. The oxide semiconductor of claim 12 , wherein an at % ratio of Y:In:Zn is in the range of about 1:21.7 to 50:14 to 41, inclusive.
14. The oxide semiconductor of claim 13 , wherein an at % ratio of Y:In:Zn is in the range of about 1:46 to 50:30 to 41, inclusive.
15. The oxide semiconductor of claim 12 , further comprising:
at least one element selected from the group consisting of Groups I, II, III, IV, and V elements and elements belonging to the lanthanide series.
16. An oxide thin film transistor comprising:
a gate;
a channel formed to correspond to the gate, the channel comprising the oxide semiconductor of claim 12 ;
a gate insulating layer formed between the gate and the channel; and
a source and a drain contacting respective sides of the channel.
17. The oxide thin film transistor of claim 16 , wherein the oxide semiconductor has an at % ratio of Y:In:Zn in the range of about 1:21.7 to 50:14 to 41, inclusive.
18. The oxide thin film transistor of claim 16 , wherein the oxide semiconductor has an at % ratio of Y:In:Zn in the range of about 1:4.6 to 50:30 to 41, inclusive.
19. The oxide thin film transistor of claim 16 , wherein the oxide semiconductor further includes,
at least one element selected from the group consisting of Groups I, II, III, IV, and V elements and elements belonging to the lanthanide series.
20. An oxide semiconductor comprising Zn and at least one of Ta and Y, wherein the oxide semiconductor is amorphous, wherein the Zn is a Zn—In composite oxide, wherein an atomic % ratio of Ta:In:Zn is in the range of about 1:2.1 to 18:1.6 to 14, inclusive, and wherein an atomic % ratio of Y:In:Zn is in the range of about 1:10 to 100:10 to 80, inclusive.
21. An oxide thin film transistor comprising:
a gate;
a channel formed to correspond to the gate, the channel comprising the oxide semiconductor of claim 20 ;
a gate insulating layer formed between the gate and the channel; and
a source and a drain contacting respective sides of the channel.
22. The oxide semiconductor of claim 20 , wherein the at least one of the Ta and Y is ionically bonded to oxygen of the Zn—In composite oxide.
23. The oxide semiconductor of claim 20 , wherein the Ta or Y is substituted for a portion of the Zn in the Zn—In composite oxide.
24. The oxide semiconductor of claim 20 , wherein the oxide semiconductor is an amorphous oxide semiconductor channel region.