Method for monitoring status of system components
A method and system are provided for monitoring status of a system component in a process chamber of a batch type processing system. The method includes exposing a system component to light from a light source and monitoring interaction of the light with the system component to determine status of the system component. The method can detect light transmission and/or light reflection from a system component during a process that can include a chamber cleaning process, a chamber conditioning process, a substrate etching process, and a substrate film formation process. The system component can be a consumable system part such as a process tube, a shield, a ring, a baffle, and a liner, and can further contain a protective coating.
1. A method of monitoring status of a system component in a process chamber of a batch type processing system, comprising:
exposing a system component of the batch type processing system to light from a light source; and
monitoring interaction of the light with the system component to monitor a state of a material deposit on the system component in order to determine a status of the system component, and further comprising performing a process in the process chamber wherein the performing comprises:
flowing a process gas including at least one of DCS and NH 3 during a chamber conditioning process.
2. A method of monitoring status of a system component in a process chamber of a batch type processing system, comprising:
exposing a system component of the batch type processing system to light from a light source; and
monitoring interaction of the light with the system component to monitor a state of a material deposit on the system component in order to determine a status of the system component, and further comprising performing a process in the process chamber, wherein the performing comprises:
flowing a process gas including at least one of NO and TEOS during a substrate film formation process.
3. A method of monitoring status of a system component in a process chamber of a batch type processing system, comprising:
exposing a system component of the batch type processing system to light from a light source; and
monitoring interaction of the light with the system component to monitor a state of a material deposit on the system component in order to determine a status of the system component, and further comprising performing a process in the process chamber wherein the performing comprises:
exposing a quartz system component to chamber pressure of about 200 mTorr and a temperature of about 300° C. during a chamber cleaning process.
4. A method of monitoring status of a system component in a process chamber of a batch type processing system, comprising:
exposing a system component of the batch type processing system to light from a light source; and
monitoring interaction of the light with the system component to monitor a state of a material deposit on the system component in order to determine a status of the system component, and further comprising performing a process in the process chamber wherein the exposing comprises:
exposing a quartz system component including a SiN protective coating and a metal oxide material deposit to the light during a chamber cleaning process.