Immersion objective lens, retention mechanism for immersion medium, and manufacturing method thereof
There is provided a retention mechanism for an immersion medium, for use in a device which observes/measures a sample by use of an immersion objective lens, includes a member which retains the immersion medium near a tip portion of the objective lens, wherein the member is configured to include at least first and second materials.
1. A retention mechanism for an immersion medium, for use in a device which observes/measures a sample by use of an immersion objective lens,
the immersion objective lens being formed of a tip portion, a lens ring portion and a lens outer frame, the lens ring portion being formed of an entire surface inclined from the lens of the tip portion to the lens outer frame,
the retention mechanism comprising:
a bottom plate which has an opening portion to be engaged around the immersion objective lens;
a wall plate arranged along a periphery of the bottom plate;
an immersion medium supply unit which supplies the immersion medium to the tip portion of the immersion objective lens; and
a drip draining unit of the immersion medium provided on the bottom plate in vicinity of the wall plate, which drains a drip of the immersion medium from the tip portion of the immersion objective lens,
the bottom plate comprising a first ring-member formed of a first material for retaining the immersion medium and arranged to surround the opening portion, the bottom plate being inclined to make a side of the opening portion higher than a side of the wall plate,
an affinity of the first ring-member with the immersion medium being lower than an affinity of an inner member of the first ring-member with the immersion medium.
2. The retention mechanism for an immersion medium, according to claim 1 , further comprising a second ring-member formed of a second material for draining the immersion medium, which is arranged outside the first ring-member to surround the first ring-member,
wherein the affinity of the first ring-member with the immersion medium is lower than an affinity of the second ring-member with the immersion medium.
3. The retention mechanism for an immersion medium, according to claim 2 , wherein a contact angle between the first ring-member and the immersion medium is greater than 60°.
4. The retention mechanism for an immersion medium, according to claim 3 , wherein the material of at least one of the first ring-member retaining the immersion medium and the second ring-member is synthetic resin.
5. The retention mechanism for an immersion medium, according to claim 1 , wherein a contact angle between the first ring-member and the immersion medium is greater than 60°.
6. The retention mechanism for an immersion medium, according to claim 5 , wherein the first ring-member retaining the immersion medium is formed of synthetic resin.
7. The retention mechanism for an immersion medium, according to claim 6 , wherein the first ring-member is a region surface-processed with a material for retaining the immersion medium.
8. The retention mechanism for an immersion medium, according to claim 1 , wherein the first ring-member retaining the immersion medium is formed of synthetic resin.
9. The retention mechanism for an immersion medium, according to claim 8 , wherein the first ring-member is a region surface-processed with a material for retaining the immersion medium.
10. The retention mechanism for an immersion medium, according to claim 1 , wherein the first ring-member is a region surface-processed with a material for retaining the immersion medium.
11. A method of manufacturing a retention mechanism for an immersion medium, for use in a device which observes/measures a sample by use of an immersion objective lens,
the immersion objective lens being formed of a tip portion, a lens ring portion and a lens outer frame, the lens ring portion being formed of an entire surface inclined from the lens of the tip portion to the lens outer frame,
the method comprising:
forming an opening portion to be engaged around the immersion objective lens, on a bottom plate;
arranging a wall plate along a periphery of the bottom plate;
providing an immersion medium supply unit which supplies the immersion medium to the tip portion of the immersion objective lens:
providing a drip draining unit of the immersion medium which drains a drip of the immersion medium from the tip portion of the immersion objective lens, on the bottom plate in vicinity of the wall plate; and
arranging a first ring-member formed of a first material for retaining the immersion medium, on the bottom plate, so as to surround the opening portion,
the bottom plate being inclined to make a side of the opening portion higher than a side of the wall plate,
an affinity of the first ring-member with the immersion medium being lower than an affinity of an inner member of the first ring-member with the immersion medium.
12. The method according to claim 11 , further comprising arranging a second ring-member formed of a second material for draining the immersion medium, which is arranged outside the first ring-member to surround the first ring-member,
wherein the affinity of the first ring-member with the immersion medium is lower than an affinity of the second ring-member with the immersion medium.
13. The method according to claim 12 , wherein a contact angle between the first ring-member and the immersion medium is greater than 60°.
14. The method according to claim 13 , wherein the material of at least one of the first ring-member retaining the immersion medium and the second ring-member is synthetic resin.
15. The method according to claim 11 , wherein a contact angle between the first ring-member and the immersion medium is greater than 60°.
16. The method according to claim 15 , wherein the first ring-member retaining the immersion medium is formed of synthetic resin.
17. The method according to claim 16 , wherein the first ring-member is a region surface-processed with a material for retaining the immersion medium.
18. The method according to claim 11 , wherein the first ring-member retaining the immersion medium is formed of synthetic resin.
19. The method according to claim 18 , wherein the first ring-member is a region surface-processed with a material for retaining the immersion medium.
20. The method according to claim 11 , wherein the first ring-member is a region surface-processed with a material for retaining the immersion medium.