Metal-gate CMOS device
A method for fabricating a metal-gate CMOS device. A substrate having thereon a first region and a second region is provided. A first dummy gate structure and a second dummy gate structure are formed within the first region and the second region respectively. A first LDD is formed on either side of the first dummy gate structure and a second LDD is formed on either side of the second dummy gate structure. A first spacer is formed on a sidewall of the first dummy gate structure and a second spacer is formed on a sidewall of the second dummy gate structure. A first embedded epitaxial layer is then formed in the substrate adjacent to the first dummy gate structure. The first region is masked with a seal layer. Thereafter, a second embedded epitaxial layer is formed in the substrate adjacent to the second dummy gate structure.
1. A metal-gate CMOS device, comprising:
a substrate having a first-conductivity-type MOS region and a second-conductivity-type MOS region;
a first-conductivity-type MOS transistor in the first-conductivity-type MOS region of the substrate;
a second-conductivity-type MOS transistor in the second-conductivity-type MOS region of the substrate;
a seal layer only masking the first-conductivity-type MOS transistor within the first-conductivity-type MOS region; and
a contact hole etch stop layer (CESL) covering the seal layer within the first-conductivity-type MOS region and covering the second-conductivity-type MOS transistor within the second-conductivity-type MOS region, wherein the contact hole etch stop layer does not contain stress.
2. The metal-gate CMOS device according to claim 1 wherein the first-conductivity-type MOS transistor comprises an embedded SiGe epitaxial layer in a source/drain region of the first-conductivity-type MOS transistor.
3. The metal-gate CMOS device according to claim 2 wherein the seal layer directly contacts with the embedded SiGe epitaxial layer.
4. The metal-gate CMOS device according to claim 1 wherein the first-conductivity-type MOS transistor comprises a first metal gate and a first gate dielectric layer, and wherein the first metal gate comprises titanium nitride, aluminum nitride, tantalum nitride, aluminum or work-function metals.
5. The metal-gate CMOS device according to claim 1 wherein the second-conductivity-type MOS transistor comprises an embedded SiC epitaxial layer in a source/drain region of the second-conductivity-type MOS transistor.
6. The metal-gate CMOS device according to claim 1 wherein the second-conductivity-type MOS transistor comprises a second metal gate and a second gate dielectric layer, and wherein the second metal gate comprises titanium nitride, aluminum nitride, tantalum nitride, aluminum or work-function metals.
7. The metal-gate CMOS device according to claim 1 wherein the seal layer is a silicon nitride seal layer.
8. The metal-gate CMOS device according to claim 1 wherein the first-conductivity-type MOS region is a PMOS region and the second-conductivity-type MOS region is a NMOS region.