Semiconductor device and method for producing same
A semiconductor device of the present invention has a semiconductor element region 17 that is provided in part of a silicon carbide layer 3 and a guard-ring region 18 that is provided in another part of the silicon carbide layer 3 surrounding the semiconductor element region 17 when seen in a direction perpendicular to a principal surface of the silicon carbide layer 3 . The semiconductor device includes: an interlayer insulation film 10 which is provided on the principal surface of the silicon carbide layer 3 in the semiconductor element region 17 and the guard-ring region 18 , the interlayer insulation film 10 having a relative dielectric constant of 20 or more; a first protective insulation film 14 provided on the interlayer insulation film in the guard-ring region 18 ; and a second protective insulation film 15 provided on the first protective insulation film 14 , wherein the first protective insulation film 14 has a linear expansion coefficient which is between a linear expansion coefficient of a material of the second protective insulation film 15 and a linear expansion coefficient of a material of the interlayer insulation film 10.
1. A semiconductor device which has a semiconductor element region that is provided in part of a silicon carbide layer and a guard-ring region that is provided in another part of the silicon carbide layer surrounding the semiconductor element region when seen in a direction perpendicular to a principal surface of the silicon carbide layer, the semiconductor device comprising:
an interlayer insulation film which is provided on the principal surface of the silicon carbide layer in the semiconductor element region and the guard-ring region, the interlayer insulation film having a relative dielectric constant of 20 or more;
a first protective insulation film provided on the interlayer insulation film in the guard-ring region, the first protective insulation film being electrically insulative; and
a second protective insulation film provided on the first protective insulation film,
wherein the first protective insulation film has a linear expansion coefficient which is between a linear expansion coefficient of a material of the second protective insulation film and a linear expansion coefficient of a material of the interlayer insulation film, and
wherein the semiconductor element region includes a field effect transistor, the field effect transistor comprising:
a silicon carbide substrate of a first conductivity type, having the silicon carbide layer on one principal surface thereof;
a gate insulation film provided on the principal surface of the silicon carbide layer;
a gate electrode provided on the gate insulation film;
a source electrode provided on the principal surface of the silicon carbide layer;
a drain electrode provided on another principal surface of the silicon carbide substrate; and
a pad electrode provided over the gate electrode with the interlayer insulation film interposed therebetween, the pad electrode being electrically connected to the source electrode,
the first protective insulation film and the second protective insulation film are not located between the gate electrode and the pad electrode, and
the first protective insulation film and the second protective insulation film cover a part of the pad electrode.
2. The semiconductor device of claim 1 , wherein a difference between the linear expansion coefficient of the material of the first protective insulation film and a linear expansion coefficient of silicon carbide is smaller than a difference between the linear expansion coefficient of the material of the second protective insulation film and the linear expansion coefficient of silicon carbide.
3. The semiconductor device of claim 1 , wherein
the first protective insulation film and the second protective insulation film are provided in the guard-ring region, and
none of the first protective insulation film and the second protective insulation film is provided in at least part of the semiconductor element region.
4. The semiconductor device of claim 1 , wherein the interlayer insulation film is made of a material selected from a group consisting of a zirconium oxide, a hafnium oxide, and a titanium oxide.
5. The semiconductor device of claim 1 , wherein the first protective insulation film is made of a material selected from a group consisting of an aluminum oxide and an aluminum nitride.
6. The semiconductor device of claim 1 , wherein
a total of a thickness of the interlayer insulation film and a thickness of the first protective insulation film is not less than 1.5 μm, and
the thickness of the interlayer insulation film is greater than the thickness of the first protective insulation film.
7. The semiconductor device of claim 1 , wherein the second protective insulation film is made of an insulative material which contains a silicon nitride.
8. The semiconductor device of claim 7 , wherein the silicon nitride contained in the second protective insulation film has a linear expansion coefficient which is not less than 2.5×10 −6 and not more than 3.0×10 −6 /° C.
9. The semiconductor device of claim 7 , wherein a thickness of the second protective insulation film is not less than 1.5 μm.
10. The semiconductor device of claim 1 , wherein the semiconductor element region includes a diode.
11. A method of fabricating a semiconductor device which has a semiconductor element region that is provided in part of a silicon carbide layer and a guard-ring region that is provided in another part of the silicon carbide layer surrounding the semiconductor element region when seen in a direction perpendicular to a principal surface of the silicon carbide layer, the method comprising the steps of:
forming an interlayer insulation film on the silicon carbide layer in the semiconductor element region and the guard-ring region, the interlayer insulation film having a relative dielectric constant of 20 or more;
forming a first protective insulation film on the interlayer insulation film in the guard-ring region, the first protective insulation film being electrically insulative; and
forming a second protective insulation film on the first protective insulation film,
wherein the first protective insulation film has a linear expansion coefficient which is between a linear expansion coefficient of a material of the second protective insulation film and a linear expansion coefficient of a material of the interlayer insulation film, and
wherein the semiconductor element region includes a field effect transistor, the field effect transistor comprising:
a silicon carbide substrate of a first conductivity type, having the silicon carbide layer on one principal surface thereof;
a gate insulation film provided on the principal surface of the silicon carbide layer;
a gate electrode provided on the gate insulation film;
a source electrode provided on the principal surface of the silicon carbide layer;
a drain electrode provided on another principal surface of the silicon carbide substrate; and
a pad electrode provided over the gate electrode with the interlayer insulation film interposed therebetween, the pad electrode being electrically connected to the source electrode,
the first protective insulation film and the second protective insulation film are not located between the gate electrode and the pad electrode, and
the first protective insulation film and the second protective insulation film cover a part of the pad electrode.