IP Library Granted Patent US 8,471,362
Granted Patent B2
US 8,471,362 · App. 13/080,042 · Granted Jun 25, 2013

Three-dimensional stacked structure semiconductor device having through-silicon via and signaling method for the semiconductor device

Inventor: Jong-joo Lee (Suwon-si, KR)
Assignee: Samsung Electronics Co., Ltd.
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Quick Facts
Patent No.
US 8,471,362
App. No.
13/080,042
Granted
Jun 25, 2013
Kind
B2
Abstract

A three-dimensional (3D) semiconductor device including a plurality of stacked layers and a through-silicon via (TSV) electrically connecting the plurality of layers, in which in signal transmission among the plurality of layers, the TSV transmits a signal that swings in a range from an offset voltage that is higher than a ground voltage to a power voltage, thereby minimizing an influence of a metal-oxide-semiconductor (MOS) capacitance of TSV.

Claims (40)

1. A three-dimensional (3D) semiconductor device comprising:

a plurality of stacked layers; and

a through-silicon via (TSV) electrically connecting the plurality of layers,

wherein in signal transmission among the plurality of layers, the TSV transmits a signal that swings in a range from an offset voltage that is higher than a ground voltage to a power voltage;

wherein each of the plurality of layers comprises an input/output buffer connected to the TSV, and the input/output buffer comprises a driver circuit which outputs a signal transmitted through the TSV and an offset circuit which causes an output signal of the driver circuit to have a level of the offset voltage.

2. The 3D semiconductor device of claim 1 , wherein the TSV comprises a first conductive material and an insulator is disposed between the first conductive material and a second conductive material of each layer, and

the first conductive material, the insulator, and the second conductive material form a capacitor.

3. The 3D semiconductor device of claim 2 , wherein the capacitor operates in a region where a capacitance of the capacitor decreases as a voltage increases.

4. The 3D semiconductor device of claim 2 , wherein the first conductive material comprises metal, the second conductive material comprises semiconductor, and the capacitor is a metal-oxide-semiconductor (MOS) capacitor.

5. The 3D semiconductor device of claim 1 , wherein the offset circuit is connected between the ground voltage and the driver circuit and comprises a diode or a resistor.

6. A three-dimensional (3D) semiconductor device comprising:

a plurality of stacked layers; and

a through-silicon via (TSV) electrically connecting the plurality of layers,

wherein the TSV comprises a first conductive material, an insulator is disposed between the first conductive material and a second conductive material of each layer, and the first conductive material, the insulator, and the second conductive material form a capacitor, and

first and second logics of a signal transmitted through the TSV are higher than a level of the ground voltage;

wherein each of the plurality of layers comprises an input/output buffer connected to the TSV, and

the input/output buffer comprises a driver circuit which outputs a signal transmitted through the TSV and an offset circuit which causes an output signal of the driver circuit to have a level of the offset voltage.

7. The 3D semiconductor device of claim 6 , wherein in signal transmission among the plurality of layers, the TSV transmits a signal that swings in a range from the offset voltage that is higher than the ground voltage to the ground voltage.

8. The 3D semiconductor device of claim 6 , wherein the capacitor operates in a region where a capacitance of the capacitor decreases as a voltage increases.

9. The 3D semiconductor device of claim 6 , wherein the offset circuit is connected between the ground voltage and the driver circuit and comprises a diode or a resistor.

10. The 3D semiconductor device of claim 6 , wherein the first conductive material comprises metal, the second conductive material comprises semiconductor, and the capacitor is a metal-oxide-semiconductor (MOS) capacitor.

11. A three-dimensional (3D) semiconductor device comprising:

a first layer comprising at least one memory cell and input/output buffer;

a second layer comprising an interface circuit for interfacing with the memory cell and an external device and controlling the memory cell, the second layer being stacked with the first layer;

at least one through-silicon via (TSV) electrically connecting the first layer and the second layer by passing through at least a portion of the first layer,

wherein in signal transmission between the first layer and the second layer, the TSV transmits a signal that swings in a range from an offset voltage that is higher than a ground voltage to a power voltage;

wherein each input/output buffer comprises a driver circuit which outputs a signal transmitted through the TSV and an offset circuit which causes an output signal of the driver circuit to have a level of the offset voltage.

12. The 3D semiconductor device of claim 11 , wherein the TSV comprises a first conductive material, an insulator is disposed between the first conductive material and a second conductive material of the first layer, and the first conductive material, the insulator, and the second conductive material form a capacitor.

13. The 3D semiconductor device of claim 12 , wherein the capacitor operates in a region where a capacitance of the capacitor decreases as a voltage increases.

14. The 3D semiconductor device of claim 11 , wherein the offset circuit is connected between the ground voltage and the driver circuit and comprises a diode or a resistor.

15. The 3D semiconductor device of claim 11 , wherein a signal transmitted through the TSV comprises at least one selected from a data signal, an address signal, and a command signal.

16. A three-dimensional (3D) semiconductor device comprising:

a first layer comprising at least one memory cell and input/output buffer;

a second layer comprising an interface circuit for interfacing with the memory cell and an external device and controlling the memory cell, the second layer being stacked with the first layer;

first and second through-silicon via (TSV) electrically connecting the first layer and the second layer by passing through at least a portion of the first layer,

wherein in signal transmission between the first layer and the second layer, the first TSV transmits a signal that swings in a range from an offset voltage that is higher than a ground voltage to a power voltage, and

in signal transmission between the first layer and the second layer, the second TSV transmits a signal that swings in a range from the ground voltage to the power voltage;

wherein each input/output buffer comprises a driver circuit which outputs a signal transmitted through the TSV and an offset circuit which causes an output signal of the driver circuit to have a level of the offset voltage.

17. The 3D semiconductor device of claim 16 , wherein the signal transmitted through the first TSV is a higher-speed signal than the signal transmitted through the second TSV.

18. The 3D semiconductor device of claim 17 , wherein the signal transmitted through the first TSV comprises a data signal, and the signal transmitted through the second TSV comprises an address or command signal.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 6, 2011
From: LEE, JONG-JOO
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 026080/0409 →
Priority Claims (1)
KR 10-2010-0058233 · Jun 18, 2010 · national
Continuity (1)
Related Publication 20110309475A1 · Dec 22, 2011