Semiconductor device
A semiconductor device includes a semiconductor substrate; an n-channel MOS transistor including a first gate insulating film provided on a p-type layer, a first gate electrode made of TiN, and a first upper gate electrode made of semiconductor doped with impurities; and a p-channel MOS transistor including a second gate insulating film provided on an n-type layer, a second gate electrode including at least as a part, a TiN layer made of TiN crystal in which a ratio of (111) orientation/(200) orientation is about 1.5 or more, and a second upper gate electrode made of semiconductor doped with impurities.
1. A semiconductor device comprising:
a semiconductor substrate including a p-type layer and an n-type layer in an upper portion;
an n-channel MOS transistor including
a first gate insulating film provided on the p-type layer,
a first gate electrode provided on the first gate insulating film and made of TiN, and
a first upper gate electrode provided on the first gate electrode and made of semiconductor doped with impurities; and
a p-channel MOS transistor including
a second gate insulating film provided on the n-type layer,
a second gate electrode provided on the second gate insulating film and made of TiN, and
a second upper gate electrode provided on the second gate electrode and made of semiconductor doped with impurities,
wherein the second gate electrode has a thickness of about 15 nm to about 25 nm, and
the second gate electrode includes a first TiN layer, the first TiN layer is made of TiN crystal in which the ratio of (111) orientation/(200) orientation is about 1.5 or more.
2. The semiconductor device of claim 1 , wherein
the entire second gate electrode is made of TiN crystal in which the ratio of (111) orientation/(200) orientation is about 1.5 or more, and
the first gate electrode is made of TiN crystal in which the ratio of (111) orientation/(200) orientation is about 1.5 or more, and which has a smaller thickness than the second gate electrode.
3. The semiconductor device of claim 1 , wherein
the first gate electrode is made of TiN crystal in which the ratio of (111) orientation/(200) orientation ranges from about 0.8 to about 1.2, and
the first gate electrode has a thickness ranging from about 4 nm to about 10 nm.
4. The semiconductor device of claim 1 , wherein
the second gate electrode further includes
a second TiN layer made of TiN crystal in which the ratio of (111) orientation/(200) orientation ranges from about 0.8 to about 1.2.
5. The semiconductor device of claim 1 wherein
La or Mg is contained inside the first gate insulating film, or at an interface between the first gate insulating film and the first gate electrode, and
Al or Ta is contained inside the second gate insulating film, or at an interface between the second gate insulating film and the second gate electrode.
6. The semiconductor device of claim 1 wherein
the first gate insulating film and the second gate insulating film are made of a high-dielectric constant material.
7. The semiconductor device of claim 1 , wherein the second gate insulating film has an equivalent oxide thickness of about 1.4 nm or less.
8. The semiconductor device of claim 1 , wherein the second gate electrode includes a TiN layer formed by an atomic layer deposition method.
9. The semiconductor device of claim 1 , wherein the first TiN layer is deposited at a deposition rate of about 0.075 nm/cycle or less.
10. The semiconductor device of claim 1 , wherein
TiN crystal, which constitutes the first TiN layer, is an oblique columnar crystal.
11. The semiconductor device of claim 1 , wherein the first gate electrode is in contact with the first upper gate electrode, and
the second gate electrode is in contact with the second upper gate electrode.
12. The semiconductor device of claim 1 , wherein the first TiN layer is deposited at a deposition rate of about 0.06 nm/cycle or less.