IP Library Granted Patent US 8,479,311
Granted Patent B2
US 8,479,311 · App. 12/747,617 · Granted Jul 2, 2013

Device and method for an atomic force microscope for the study and modification of surface properties

Inventors: Stefan Kubsky (Les Ulis, FR); Deirdre Olynick (El Cerrito, CA); Peter Schuck (Richmond, CA); Jan Meijer (Bochum, DE); Ivo W. Rangelow (Baunatal, DE)
Assignees: Technische Universitat Ilmenau; Synchrotron Soleil; The Regents of the University of California
G01Q60/24
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Quick Facts
Patent No.
US 8,479,311
App. No.
12/747,617
Granted
Jul 2, 2013
Kind
B2
Abstract

The invention relates to a device for an atomic force microscope (AFM) for the study and/or modification of surface properties. The device comprises a cantilever (flexible bar) having an integrated, piezoresistive sensor, an integrated bimorphic actuator, and a measuring tip. The measuring tip carries at least two metal electrodes, which can be activated via electrical terminals. The measuring tip and/or the cantilever have at least one nanoscopic hole through which synchrotron radiation or laser light is directed onto the material surface to be studied. Furthermore, the invention relates to a method for the study and modification of surface properties and surface-proximal properties, which can be executed using such a device. To this end, atomic force microscopy (AFM), surface enhanced Raman scattering (SERS), photo emission spectroscopy (XPS, XAS), and material modification by local exposure are executed in sequence or simultaneously using the same device.

Claims (26)

1. An atomic force microscope (AFM) device for studying and/or modifying a material surface, comprising:

a cantilever having an integrated, piezo-resistive sensor, an integrated bimorph-actuator, and a measurement tip, said cantilever and/or the measurement tip having at least one nanoscopic hole;

at least two metallic electrodes carried by the measurement tip to represent a Plasmon resonator; and

at least one electrical connection for controlling said electrodes.

2. The AFM device according to claim 1 , wherein the piezo-resistive sensor, the bimorph-actuator, and the electrodes are independently controllable of each other.

3. The AFM device according to claim 2 , wherein the piezo-resistive sensor, the bimorph-actuator, and the electrodes are disposed on the cantilever and galvanically separated from one another.

4. The AFM device according to claim 3 , wherein the at least one nanoscopic hole includes a plurality of nanoscopic holes.

5. The AFM device according to claim 4 , further comprising an aperture support disposed on a side of the cantilever opposing the material surface, said aperture support having an initial aperture disposed therein through which a synchrotron radiation or a laser light is guided.

6. The AFM device according to claim 5 , wherein the aperture support is movable along axes that run perpendicularly through the initial aperture in order to align the initial aperture with the hole.

7. The AFM device according to claim 4 , wherein the at least two metallic electrodes includes at least four electrodes attached to the measurement tip, said four electrodes being controllable in pairs independently of each other by the electrical connections.

8. The AFM device according to claim 1 , wherein the at least one nanoscopic hole includes a plurality of nanoscopic holes.

9. The AFM device according to claim 8 , wherein the plurality of nanoscopic holes are formed in the cantilever.

10. The AFM device according to claim 1 , further comprising an aperture support disposed on a side of the cantilever opposing the material surface, said aperture support having an initial aperture disposed therein through which a synchrotron radiation or a laser light is guided.

11. The AFM device according to claim 10 , wherein the aperture support is movable along axes that run perpendicularly through the initial aperture in order to align the initial aperture with the hole.

12. The AFM device according to claim 1 , wherein the at least two metallic electrodes includes at least four electrodes attached to the measurement tip, said four electrodes being controllable in pairs independently of each other by the electrical connections.

13. A method for studying and modifying material surfaces and near-surface properties, characterized using the AFM device set forth in claim 1 .

14. The method of claim 13 further comprising: performing atomic force microscopy (AFM); performing resonant Raman scattering (SERS); performing photoemission spectroscopy (XPS, XAS); and performing a material modification using local illumination.

15. The method of claim 14 wherein the performing steps are executed consecutively.

16. The method of claim 14 wherein the performing steps are executed simultaneously.

17. A method for studying and modifying material surfaces and near-surface properties, characterized using the AFM device set forth in claim 1 , the method further comprising: performing atomic force microscopy (AFM); performing resonant Raman scattering (SERS); performing photoemission spectroscopy (XPS, XAS); and performing a material modification using local illumination.

18. An atomic force microscope (AFM) device for studying and/or modifying a material surface, comprising:

a cantilever having an integrated, piezo-resistive sensor, an integrated bimorph-actuator, and a measurement tip;

at least two metallic electrodes carried by the measurement tip;

at least one electrical connection for controlling said electrodes;

at least one nanoscopic hole associated with the cantilever through which a synchrotron radiation or a laser light is aimed onto the material surface to be studied and/or modified; and

an aperture support disposed on a side of the cantilever opposing the material surface, said aperture support having an initial aperture disposed therein through which the synchrotron radiation or the laser light is guided, wherein the aperture support is movable along axes that run perpendicularly through the initial aperture in order to align the initial aperture with the hole.

Assignments (3)
CONFIRMATORY LICENSE Recorded Feb 5, 2025
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 070116/0758 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 13, 2011
From: OLYNICK, DEIRDRE L.; SCHUCK, PETER JAMES; KUBSKY, STEFAN; MEIJER, JAN; RANGELOW, IVO W.
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 026113/0549 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 13, 2011
From: KUBSKY, STEFAN; MEIJER, JAN; RANGELOW, IVO W.
To: TECHNISCHE UNIVERSITAT ILMENAU; SYNCHROTRON SOLEIL
Reel/Frame 026113/0580 →
Priority Claims (1)
DE 10 2007 060 460 · Dec 11, 2007 · national
Continuity (1)
Related Publication 20110055985A1 · Mar 3, 2011