SOI schottky source/drain device structure to control encroachment and delamination of silicide
A Schottky field effect transistor is provided that includes a substrate having a layer of semiconductor material atop a dielectric layer, wherein the layer of semiconductor material has a thickness of less than 10.0 nm. A gate structure is present on the layer of semiconductor material. Raised source and drain regions comprised of a metal semiconductor alloy are present on the layer of semiconductor material on opposing sides of the gate structure. The raised source and drain regions are Schottky source and drain regions. In one embodiment, a first portion of the Schottky source and drain regions that is adjacent to a channel region of the Schottky field effect transistor contacts the dielectric layer, and a non-reacted semiconductor material is present between a second portion of the Schottky source and drain regions and the dielectric layer.
1. A Schottky field effect transistor comprising:
a substrate having a layer of semiconductor material atop a dielectric layer, wherein the layer of semiconductor material has a thickness of less than 10.0 nm;
a gate structure present on a channel portion of the layer of the semiconductor material; and
raised source and drain regions comprised of a metal semiconductor alloy in direct contact with the layer of semiconductor material on opposing sides of the gate structure, wherein a portion of the metal semiconductor alloy adjacent to the channel portion of the layer of the semiconductor material contacts the dielectric layer, wherein a non-reacted semiconductor material is present between the raised metal semiconductor alloy source and drain regions and the dielectric layer.
2. The Schottky field effect transistor of claim 1 , wherein the non-reacted semiconductor material has a thickness of less than 5.0 nm.
3. The Schottky field effect transistor of claim 1 , comprising an n-type device and said raised metal semiconductor alloy source and drain regions are composed of nickel silicide (NiSi x ), nickel platinum silicide (NiPt y Si x ) or a combination thereof, or a p-type device and said raised metal semiconductor alloy source and drain regions are composed of nickel silicide (NiSi x ), nickel platinum silicide (NiPt y Si x ) or a combination thereof.
4. The Schottky field effect transistor of claim 1 , wherein the raised metal semiconductor alloy source and drain regions do not encroach to underneath the gate structure.
5. The Schottky field effect transistor of claim 1 , wherein the gate structure includes a high-k gate dielectric.
6. The Schottky field effect transistor of claim 5 , wherein the high-k gate dielectric is comprised of HfO 2 .
7. The Schottky field effect transistor of claim 1 , wherein the gate structure includes a gate conductor comprising polysilicon, W, Cu, Pt, Ag, Au, Ru, Ir, Rh, Re or a combination thereof.
8. The Schottky field effect transistor of claim 1 , wherein the metal semiconductor alloy does not encroach under the gate structure.
9. The Schottky field effect transistor of claim 1 , wherein an end of the metal semiconductor alloy is aligned to a sidewall of the gate structure.
10. A Schottky field effect transistor comprising:
a substrate having a layer of semiconductor material atop an dielectric layer, wherein the layer of semiconductor material has a thickness of less than 10.0 nm;
a gate structure present on the layer of the semiconductor material; and
Schottky source and drain regions comprised of a metal semiconductor alloy in direct contact with the layer of semiconductor material on opposing sides of the gate structure, wherein a first portion of the Schottky source and drain regions that is adjacent to a channel region of the Schottky field effect transistor contacts the dielectric layer, and a non-reacted semiconductor material is present between a second portion of the Schottky source and drain regions and the dielectric layer.
11. The Schottky field effect transistor of claim 10 , wherein the metal semiconductor alloy does not encroach under the gate structure.
12. The Schottky field effect transistor of claim 10 , wherein an end of the metal semiconductor alloy is aligned to a sidewall of the gate structure.
13. The Schottky field effect transistor of claim 10 , wherein a thickness of the non-reacted semiconductor material ranges from 1.0 nm to 5.0 nm as measured from the dielectric layer.
14. The Schottky field effect transistor of claim 10 , wherein the Schottky source regions and the Schottky drain regions have a thickness ranging from 5 nm to 20 nm.
15. The Schottky field effect transistor of claim 10 , wherein a semiconductor element of the metal semiconductor alloy is comprised of Si, Ge or a combination thereof.
16. The Schottky field effect transistor of claim 10 , wherein the gate structure includes a high-k gate dielectric.
17. The Schottky field effect transistor of claim 16 , wherein the high-k gate dielectric is comprised of HfO 2 .
18. The Schottky field effect transistor of claim 10 , wherein the gate structure includes a gate conductor comprising polysilicon, W, Cu, Pt, Ag, Au, Ru, Ir, Rh, Re or a combination thereof.
19. The Schottky field effect transistor of claim 10 , wherein the metal semiconductor alloy is comprised of a mid gap metal.
20. The Schottky field effect transistor of claim 10 , wherein the metal semiconductor alloy is comprised of a silicide.