Infrared image sensor
An image sensor comprises a photoelectric conversion element receiving light to accumulate photocharges, and a wavelength conversion layer formed above the photoelectric conversion element to convert light within a first wavelength band into light within a second wavelength band shorter than the first wavelength band and supply the converted light to the photoelectric conversion element.
1. An image sensor comprising:
a photoelectric conversion element including a photodiode formed by doping impurities in a semiconductor substrate;
a wavelength conversion layer disposed above the photoelectric conversion element to convert light within a first wavelength band into light within a second wavelength band shorter than the first wavelength band and to supply the converted light to the photoelectric conversion element;
floating diffusion regions formed in the semiconductor substrate on opposite sides of the photodiode; and
charge transfer gate electrodes disposed on the semiconductor substrate between the floating diffusion regions and the photodiode.
2. The image sensor of claim 1 , wherein the wavelength conversion layer comprises a material capable of converting light within an infrared wavelength band into light within a visible wavelength band.
3. The image sensor of claim 2 , wherein the wavelength conversion layer comprises glass doped with ZnSe nanocrystals.
4. The image sensor of claim 1 , wherein the photodiode is formed at a depth between 0.1 μm to 10 μm from a surface of the semiconductor substrate.
5. The image sensor of claim 1 , further comprising:
an optical filter layer disposed above the wavelength conversion layer to selectively transmit light within an infrared wavelength band.
6. The image sensor of claim 1 , further comprising:
insulating layers stacked on the photoelectric conversion element and wiring layers formed in the insulating layers.
7. The image sensor of claim 1 , further comprising:
microlenses that collect incident light to the photoelectric conversion element.
8. An image sensor comprising:
a semiconductor substrate comprising an infrared pixel region and visible ray pixel regions;
photoelectric conversion elements formed in the infrared pixel region and the visible ray pixel regions, respectively;
a wavelength conversion layer converting light within a first wavelength band into light within a second wavelength band shorter than the first wavelength band and supplying the converted light to the photoelectric conversion element in the infrared pixel region; and
color filter layers disposed above the visible ray pixel regions to transmit light with a red wavelength band, light with a blue wavelength band, and light with a green wavelength band, respectively.
9. The image sensor of claim 8 , wherein the wavelength conversion layer comprises a material capable of converting light with an infrared wavelength band into light with a visible wavelength band.
10. The image sensor of claim 9 , wherein the wavelength conversion layer comprises glass doped with ZnSe nanocrystals.
11. The image sensor of claim 8 , wherein the photoelectric conversion elements comprise photodiodes formed by doping impurities in a semiconductor substrate.
12. The image sensor of claim 11 , wherein a depth of the photodiode in the infrared pixel region is substantially the same as a depth of the photodiodes in the visible ray pixel regions.
13. The image sensor of claim 11 , wherein the visible ray pixel regions comprise first through third color pixel regions; and
the photodiodes formed in the first through third color pixel regions have different depths from a surface of the semiconductor substrate.
14. The image sensor of claim 13 , wherein the depth of the photodiode in the first color pixel region is larger than the depths of the photodiodes in the second and third color pixel regions,
the depth of the photodiode in the third color pixel region is smaller than the depths of the photodiodes in the first and second color pixel regions, and
the depth of the photodiode in the infrared pixel region is smaller than the depth of the photodiode in the first color pixel region and is larger than the depth of the photodiode in the third color pixel region.
15. The image sensor of claim 8 , wherein the infrared pixel region further comprises a first optical filter that selectively transmits light within an infrared wavelength band and is located above the wavelength conversion layer.
16. The image sensor of claim 8 , wherein the visible ray pixel regions further comprise a second optical filter that selectively transmits light within a visible ray wavelength band and is located above the color filter layer.