Liquid crystal display device and fabricating method thereof
A liquid crystal display device includes a substrate, a gate electrode disposed on the substrate, a gate pad disposed on the substrate, an insulating film disposed on the gate electrode and the gate pad, an active layer disposed on the insulating film above the gate electrode, an ohmic contact layer disposed on portions of the active layer, a source electrode and a drain electrode disposed on the ohmic contact layer, a passivation layer disposed on the source and drain electrodes, a pixel electrode disposed on the passivation layer and contacting the drain electrode, and a transparent electrode disposed on the passivation layer and contacts the gate pad, wherein the gate electrode and the gate pad both include a first layer formed of a first metal and a second layer formed of an alloy of the first metal and a second metal disposed at an upper surface of the first layer.
1. A method of fabricating a liquid crystal display device, comprising the steps of:
sequentially depositing a first metal layer of a first metal and a second metal layer of a second metal on an entire surface of a substrate;
naturally forming an alloy layer using heat generated from the deposition of the second metal layer during the deposition of the second metal layer, the alloy layer being formed from an alloy including the first metal of the first metal layer and the second metal of the second metal layer within an upper portion of the first metal layer;
removing the second metal layer on the alloy layer;
patterning the first metal layer and the alloy layer using a mask process to form a conductive line;
forming an insulating film having a contact hole on the alloy layer; and
forming a transparent electrode in electrical contact with the alloy layer via the contact hole.
2. The method according to claim 1 , wherein the first metal includes an aluminum-alloy.
3. The method according to claim 1 , wherein the first metal layer has a thickness of about 2000 to 3000 Å.
4. The method according to claim 1 , wherein the second metal is one of molybdenum and chromium.
5. The method according to claim 4 , wherein the second metal layer has a thickness of about 100 to 500 Å.
6. The method according to claim 1 , wherein said conductive line includes one of a gate line, a gate electrode, and a gate pad.