Oxide semiconductor device including insulating layer and display apparatus using the same
Provided is an oxide semiconductor device including an oxide semiconductor layer and an insulating layer coming into contact with the oxide semiconductor layer in which the insulating layer includes: a first insulating layer coming into contact with an oxide semiconductor, having a thickness of 50 nm or more, and including an oxide containing Si and O; a second insulating layer coming into contact with the first insulating layer, having a thickness of 50 nm or more, and including a nitride containing Si and N; and a third insulating layer coming into contact with the second insulating layer, the first insulating layer and the second insulating layer having hydrogen contents of 4×10 21 atoms/cm 3 or less, and the third insulating layer having a hydrogen content of more than 4×10 21 atoms/cm 3 .
1. An oxide semiconductor device, comprising:
an oxide semiconductor layer; and
an insulating layer in contact with the oxide semiconductor layer,
wherein the insulating layer comprises:
a first insulating layer in contact with the oxide semiconductor layer, having a thickness of 50 nm or more, and comprising an oxide containing Si and O;
a second insulating layer in contact with the first insulating layer, having a thickness of 50 nm or more, and comprising a nitride containing Si and N; and
a third insulating layer in contact with the second insulating layer; and
wherein the first insulating layer and the second insulating layer each have a hydrogen content of 4×10 21 atoms/cm 3 or less, and the third insulating layer has a hydrogen content of more than 4×10 21 atoms/cm 3 .
2. The oxide semiconductor device according to claim 1 , wherein the first insulating layer comprises silicon oxide, the second insulating layer comprises silicon nitride, and the third insulating layer comprises one of silicon nitride and silicon oxynitride.
3. The oxide semiconductor device according to claim 1 , wherein the first insulating layer and the second insulating layer are continuously formed to be an insulating layer.
4. The oxide semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises an amorphous oxide semiconductor containing at least one element selected from the group consisting of Sn, In, and Zn.
5. The oxide semiconductor device according to claim 1 , wherein at least one of the first insulating layer and the second insulating layer is used as a gate insulating layer.
6. A display apparatus comprising:
the oxide semiconductor device according to claim 1 ,
a display device connected to one of a source electrode and a drain electrode on a substrate.
7. The display apparatus according to claim 6 , wherein the display device comprises an electroluminescence device.
8. The display apparatus according to claim 6 , wherein the display device comprises a liquid crystal cell.
9. The display apparatus according to claim 6 , wherein a plurality of the display devices and a plurality of the oxide semiconductor devices are two-dimensionally arranged on the substrate.