IP Library Granted Patent US 8,502,218
Granted Patent B2
US 8,502,218 · App. 12/723,190 · Granted Aug 6, 2013

Large-area, free-standing metal oxide films and transistors made therefrom

Inventors: Xudong Wang (Madison, WI); Zhenqiang Ma (Middleton, WI); Fei Wang (Madison, WI); Jung-Hun Seo (Madison, WI)
Assignee: Wisconsin Alumni Research Foundation
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Quick Facts
Patent No.
US 8,502,218
App. No.
12/723,190
Granted
Aug 6, 2013
Kind
B2
Abstract

The present invention provides continuous, free-standing metal oxide films and methods for making said films. The methods are able to produce large-area, flexible, thin films having one or more continuous, single-crystalline metal oxide domains. The methods include the steps of forming a surfactant monolayer at the surface of an aqueous solution, wherein the headgroups of the surfactant molecules provide a metal oxide film growth template. When metal ions in the aqueous solution are exposed to the metal oxide film growth template in the presence of hydroxide ions under suitable conditions, a continuous, free-standing metal oxide film can be grown from the film growth template downward into the aqueous solution.

Claims (22)

1. A continuous, free-standing metal oxide film having as thickness of no greater than 10 μm and comprising at least one continuous, single-crystalline metal oxide domain having an area of at least 0.1 μm 2 .

2. The metal oxide film of claim 1 , wherein the at least one continuous, single-crystalline metal oxide domain has an area of at least 1 μm 2 .

3. The metal oxide film of claim 1 , wherein the at least one continuous, single-crystalline metal oxide domain has an area of at least 100 μm 2 .

4. The metal oxide film of claim 1 having a surface area of at least 1 cm 2 .

5. The metal oxide film of claim 1 , wherein the metal oxide is zinc oxide.

6. The metal oxide film of claim 5 having a thickness no greater than about 100 μm.

7. The metal oxide film of claim 5 , wherein the zinc oxide comprises the wurtzite phase of zinc oxide.

8. The metal oxide film of claim 5 , wherein the zinc oxide comprises a Zn 0.75 O x structure.

9. The metal oxide film of claim 1 , further comprising a surfactant associated with the surface of the metal oxide.

10. The metal oxide film of claim 1 , wherein the metal oxide is at least one of a magnesium oxide, a copper oxide, a titanium oxide, a tin oxide or a barium titanium oxide.

11. A continuous, free-standing zinc oxide film, wherein the zinc oxide has Zn 0.75 O x structure.

12. The zinc oxide film of claim 11 , comprising at least one continuous, single-crystalline Zn 0.75 O x domain having an area of at least 0.1 μm 2 .

13. The zinc oxide film of claim 11 , comprising at least one continuous, single-crystalline Zn 0.75 O x domain having an area of at least 1 μm 2 .

14. The zinc oxide film of claim 11 having a thickness of no greater than about 1000 nm.

15. A transistor incorporating the metal oxide film of claim 1 as an active Layer.

16. The metal oxide film of claim 5 having a thickness no greater than about 20 nm.

17. The metal oxide film of claim 1 , wherein the metal oxide film is adhered to an adhesive substrate comprising an adhesive layer on a flexible polymeric layer, wherein the adhesive substrate does not provide the metal film with its self-supporting structural integrity.

18. The metal oxide film of claim 7 , wherein the single-crystalline metal oxide domain is characterized by a hexagonal lateral perimeter.

19. The metal oxide film of claim 8 , wherein the single-crystalline metal oxide domain is characterized by a rectangular lateral perimeter.

20. The metal oxide film of claim 1 , wherein the single-crystalline metal oxide domain has a thickness of no greater than 1 μm, a length dimension of greater than 10 μm and a width dimension of greater than 10 μm.

21. The metal oxide film of claim 20 , wherein the single-crystalline metal oxide domain has a thickness of no greater than 100 nm and a length dimension or width dimension of at least 50 μm.

22. The metal oxide film of claim 20 , wherein the single-crystalline metal oxide domain has an area of at least 1000 μm 2 .

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 29, 2010
From: WANG, XUDONG; MA, ZHENQIANG; WANG, FEI; SEO, JUNG-HUN
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 025061/0309 →
CONFIRMATORY LICENSE Recorded May 14, 2010
From: WISCONSIN ALUMNI RESEARCH FOUNDATION
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 024385/0143 →
Continuity (1)
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