Piezoelectric actuator and liquid transfer device
A vibration plate, an insulating layer and a plurality of piezoelectric layers, connected to each other, are connected to an upper face of a flow passage unit. Between the plurality of piezoelectric layers, there is provided an intermediate electrode having: opposing portions opposed to center portions of pressure chambers; and connecting portions for connecting the opposing portions at a region opposed to connection portion with the flow passage unit. Between the insulating layer and one of the piezoelectric layers, there is provided a lower electrode extending across the entire region not opposed to the intermediate electrode, including regions opposed to regions of the pressure chambers located outside the center portions thereof. At an upper face of the other piezoelectric layer, upper electrodes are located to be opposed to the pressure chambers. A shielding electrode is arranged between the vibration plate and the insulating layer across the entire regions thereof.
1. A piezoelectric actuator comprising:
a vibration plate that is connected to an object at a predetermined connection portion, and that has a deformable portion at a region different from the connection portion;
a first piezoelectric layer arranged at one face side of the vibration plate;
a second piezoelectric layer arranged at one face of the first piezoelectric layer; and
three types of drive electrodes arranged at respective faces of the first piezoelectric layer and the second piezoelectric layer said respective faces not being in contact with each other, so as to be opposed to at least the deformable portion, respectively,
wherein the three types of the drive electrodes include:
a first drive electrode maintained at a first potential;
a second drive electrode maintained at a second potential different from the first potential; and
a third drive electrode, which is opposed to the first drive electrode and the second drive electrode at a region opposed to the deformable portion, and to which either the first potential or the second potential is applied,
wherein the first piezoelectric layer and the second piezoelectric layer are not sandwiched between the first drive electrode and the second drive electrode at regions opposed to the connection portion,
wherein the second drive electrode is arranged between the first piezoelectric layer and the second piezoelectric layer so as to be opposed to a part of the deformable portion, and
wherein the first drive electrode is arranged at the other face of the first piezoelectric layer so as to be opposed to a region of the deformable portion which is different from said part,
wherein the vibration plate includes a plurality of deformable portions,
wherein the second drive electrode includes:
a plurality of opposing portions opposed to the plurality of deformable portions, respectively; and
a connecting portion that is opposed to the connection portion, and that connects the plurality of opposing portions to each other, and
wherein the first drive electrode is arranged so as not to be opposed to the connecting portion.
2. The piezoelectric actuator according to claim 1 ,
wherein the third drive electrode is arranged at a face of the second piezoelectric layer not facing toward the first piezoelectric layer so as to be opposed to the second drive electrode, and opposed to the first drive electrode without the second drive electrode.
3. The piezoelectric actuator according to claim 2 ,
wherein the second drive electrode is arranged so as to be opposed to an approximate center portion of the deformable portion, and
wherein the first drive electrode is arranged so as to be opposed to at least a region of the deformable portion which is located outside a region thereof opposed to the second drive electrode.
4. The piezoelectric actuator according to claim 2 ,
wherein the first drive electrode is arranged at a region opposed to the deformable portion, so as not to be opposed to the second drive electrode.
5. A piezoelectric actuator comprising:
a vibration plate that is connected to an object at a predetermined connection portion, and that has a deformable portion at a region different from the connection portion;
a first piezoelectric layer arranged at one face side of the vibration plate;
a second piezoelectric layer arranged at one face of the first piezoelectric layer; and
three types of drive electrodes arranged at respective faces of the first piezoelectric layer and the second piezoelectric layer said respective faces not being in contact with each other, so as to be opposed to at least the deformable portion, respectively,
wherein the three types of the drive electrodes include:
a first drive electrode maintained at a first potential;
a second drive electrode maintained at a second potential different from the first potential; and
a third drive electrode, which is opposed to the first drive electrode and the second drive electrode at a region opposed to the deformable portion, and to which either the first potential or the second potential is applied,
wherein the first piezoelectric layer and the second piezoelectric layer are not sandwiched between the first drive electrode and the second drive electrode at regions opposed to the connection portion,
wherein the first potential is a ground potential, and
wherein the piezoelectric actuator further comprises:
an insulating layer arranged between the first piezoelectric layer and the vibration plate; and
a shielding electrode arranged at a face of the insulating layer not facing toward the first piezoelectric layer at a region opposed to at least the second drive electrode but not opposed to the first electrode, the shielding electrode being maintained at the first potential so as to shield application of the second potential of the second drive electrode to the object.
6. The piezoelectric actuator according to claim 5 ,
wherein the shielding electrode is arranged across the entire face of the insulating layer not facing toward the first piezoelectric layer.
7. The piezoelectric actuator according to claim 1 ,
wherein the plurality of deformable portions are arranged in one direction,
wherein the connecting portion connects ends of the plurality of opposing portions in a direction perpendicular to said one direction, and
wherein a plurality of the first drive electrodes are provided, and the plurality of first drive electrodes are arranged at a face of the first piezoelectric layer adjacent to the vibration plate so as to be opposed to a plurality of areas that are surrounded by the plurality of opposing portions and the connecting portion, and that are not continuous with each other.
8. The piezoelectric actuator according to claim 5 ,
wherein the first drive electrodes and the shielding electrode are connected to each other via a through hole formed in the insulating layer.
9. A liquid transfer device comprising:
a flow passage unit in which a liquid transfer flow passage including a pressure chamber is formed;
a piezoelectric actuator that changes a volumetric capacity of the pressure chamber, to apply pressure to liquid inside the pressure chamber; and
a drive part for applying a driving voltage to the piezoelectric actuator,
wherein the piezoelectric actuator comprises:
a vibration plate connected to the flow passage unit at a connection portion other than a region opposed to the pressure chamber;
a first piezoelectric layer arranged on a side of the vibration plate not facing toward the flow passage unit;
a second piezoelectric layer arranged at a face of the first piezoelectric layer not facing toward the vibration plate; and
first, second and third drive electrodes arranged at respective faces of the first piezoelectric layer and the second piezoelectric layer said respective faces not being in contact with each other, so as to be opposed to at least the pressure chamber,
wherein the drive part applies a first potential to the first drive electrode, applies a second potential different from the first potential to the second drive electrode, and applies either the first potential or the second potential to the third drive electrode,
wherein the first drive electrode is opposed to the connection portion and the pressure chamber,
wherein the third drive electrode is arranged so as to be opposed to at least the pressure chamber, the first drive electrode and the second drive electrode,
wherein the first piezoelectric layer and the second piezoelectric layer are not sandwiched between the first drive electrode and the second drive electrode at regions opposed to the connection portion,
wherein the second drive electrode is arranged between the first piezoelectric layer and the second piezoelectric layer so as to be opposed to a part of the deformable portion, and
wherein the first drive electrode is arranged at the other face of the first piezoelectric layer so as to be opposed to a region of the deformable portion which is different from said part.
10. A liquid transfer device comprising:
a flow passage unit in which a liquid transfer flow passage including a pressure chamber is formed;
a piezoelectric actuator that changes a volumetric capacity of the pressure chamber, to apply pressure to liquid inside the pressure chamber; and
a drive part for applying a driving voltage to the piezoelectric actuator,
wherein the piezoelectric actuator comprises:
a vibration plate connected to the flow passage unit at a connection portion other than a region opposed to the pressure chamber;
a first piezoelectric layer arranged on a side of the vibration plate not facing toward the flow passage unit;
a second piezoelectric layer arranged at a face of the first piezoelectric layer not facing toward the vibration plate; and
first, second and third drive electrodes arranged at respective faces of the first piezoelectric layer and the second piezoelectric layer said respective faces not being in contact with each other, so as to be opposed to at least the pressure chamber,
wherein the drive part applies a first potential to the first drive electrode, applies a second potential different from the first potential to the second drive electrode, and applies either the first potential or the second potential to the third drive electrode,
wherein the first drive electrode is opposed to the connection portion and the pressure chamber,
wherein the third drive electrode is arranged so as to be opposed to at least the pressure chamber, the first drive electrode and the second drive electrode,
wherein the first piezoelectric layer and the second piezoelectric layer are not sandwiched between the first drive electrode and the second drive electrode at regions opposed to the connection portion,
wherein the first potential is a ground potential, and
wherein the piezoelectric actuator further comprises:
an insulating layer arranged between the first piezoelectric layer and the vibration plate; and
a shielding electrode arranged at a face of the insulating layer not facing toward the first piezoelectric layer at a region opposed to at least the second drive electrode but not opposed to the first electrode, the shielding electrode being maintained at the first potential so as to shield application of the second potential of the second drive electrode to the object.