MEMS element and method for manufacturing same
An acceleration sensor is formed using an etched layer sandwiched between first and second substrates. In this case, a structure including a movable portion which is displaceable in the thickness direction of the substrates, and a support frame are formed in the etched layer. In addition, first and second fixed electrodes are formed on the first and second substrates, respectively, at a position facing the movable portion. Further, a remaining sacrificial layer is provided on the substrate by leaving a portion of a second sacrificial layer when a first sacrificial layer is entirely etched away. Therefore, when the first sacrificial layer is etched away, corrosion of the structure and the support beams is prevented because the second sacrificial layer is preferentially corroded as compared to the structure.
1. A MEMS element comprising:
a substrate;
a fixed portion fixed to the substrate;
a movable portion spaced from the substrate; and
a support beam connecting the movable portion to the fixed portion; wherein
the fixed portion, the movable portion, and the support beam are made of a metal layer laminated on the substrate with a first sacrificial layer provided therebetween, the first sacrificial layer being capable of being entirely etched away;
a second sacrificial layer is arranged on the substrate so as to be electrically connected to the movable portion, the second sacrificial layer having a higher ionization tendency than that of the movable portion so as to be capable of being preferentially etched away as compared to the movable portion; and
a portion of the second sacrificial layer remains after the first sacrificial layer has been entirely etched away.