IP Library Granted Patent US 8,508,021
Granted Patent B2
US 8,508,021 · App. 12/962,183 · Granted Aug 13, 2013

Phase-change memory device and method of fabricating the same

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Quick Facts
Patent No.
US 8,508,021
App. No.
12/962,183
Granted
Aug 13, 2013
Kind
B2
Abstract

A phase-change memory device with improved deposition characteristic and a method of fabricating the same are provided. The phase-change memory device includes a semiconductor substrate having a phase-change area, a first material-rich first phase-change layer forming an inner surface of the phase-change area and comprised of a hetero compound of the first material and a second material, and a second phase-change layer formed on a surface of the first phase-change layer to fill the phase-change area.

Claims (11)

1. A phase-change memory device, comprising:

a semiconductor substrate having a phase-change area of a hole type;

a first material-rich first phase-change layer formed only on sidewalls and bottom of the phase-change area and including a hetero compound of the first material and a second material; and

a second phase-change layer formed on a surface of the first phase-change layer to fill the phase-change area.

2. The phase-change memory device according to claim 1 , wherein the first material is antimony (Sb) and the second material is tellurium (Te).

3. The phase-change memory device according to claim 1 , wherein the first material is germanium (Ge) and the second material is tellurium (Te).

4. The phase-change memory layer according to claim 1 , wherein the first material is silicon (Si) and the second material is antimony (Sb).

5. The phase-change memory device of claim 1 , wherein the second phase-change layer is formed of a ternary compound including third to fifth materials.

6. The phase-change memory device of claim 5 , wherein the second phase-change layer is a chalcogenide (GST) layer comprised of germanium (Ge), antimony (Sb) and tellurium (Te).

7. The phase-change memory device of claim 1 , further comprising a lower electrode electrically connected to the first phase-change layer on the semiconductor substrate.

8. The phase-change memory device of claim 1 , wherein at least one of the first and second phase-change layers includes a dopant.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE IS HYNIX SEMICONDUCTOR INC. NOT HYNIX-SEMICONDUCTOR INC. THERE IS NO HYPHEN IN THE NAME. PREVIOUSLY RECORDED ON REEL 67328 FRAME 814. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME. Recorded May 14, 2024
From: HYNIX SEMICONDUCTOR INC.
To: SK HYNIX INC.
Reel/Frame 067412/0482 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 9, 2024
From: SK HYNIX INC.
To: MIMIRIP LLC
Reel/Frame 067369/0832 →
CHANGE OF NAME Recorded May 6, 2024
From: HYNIX-SEMICONDUCTOR INC.
To: SK HYNIX INC.
Reel/Frame 067328/0814 →