Overlay mark assistant feature
A method and apparatus for alignment are disclosed. An exemplary apparatus includes a substrate having an alignment region; an alignment feature in the alignment region of the substrate; and a dummy feature disposed within the alignment feature. A dimension of the dummy feature is less than a resolution of an alignment mark detector.
1. An integrated circuit device comprising:
a semiconductor substrate having an alignment region;
an alignment feature in the alignment region of the substrate;
a dummy feature disposed within the alignment feature, wherein a dimension of the dummy feature is less than a resolution of an alignment mark detector; and
another alignment feature formed directly over the dummy feature such that a portion of said another alignment feature overlaps a portion of the dummy feature.
2. The integrated circuit device of claim 1 wherein the alignment feature is an overlay mark.
3. The integrated circuit device of claim 2 wherein the overlay mark is an outer box of a box-in-box alignment pattern.
4. The integrated circuit device of claim 1 further comprising a material layer over the substrate, wherein the alignment and dummy features are disposed in the material layer.
5. The integrated circuit device of claim 4 wherein the material layer is an active layer, a polysilicon layer, a metal layer, or a contact layer.
6. The integrated circuit device of claim 1 further comprising:
a device region of the substrate; and
a device feature in the device region of the substrate.
7. The integrated circuit device of claim 6 wherein the alignment feature and the device feature include a same type of gate stack.
8. The integrated circuit device of claim 1 wherein the dimension of the dummy feature is a width of the dummy feature, the width being less than about 100 nm and greater than about 36 nm.
9. An apparatus comprising:
a semiconductor substrate;
a plurality of gate stacks disposed over the semiconductor substrate, the plurality of gate stacks configured as an alignment mark having an open region;
a sub-resolution feature disposed over the semiconductor substrate within the open region of the alignment mark, wherein a dimension of the sub-resolution feature is less than a resolution of an alignment mark detector; and
another alignment mark formed directly over the sub-resolution feature such that a portion of said another alignment mark overlaps a portion of the sub-resolution feature.
10. The apparatus of claim 9 wherein the alignment mark is an overlay mark.
11. The apparatus of claim 10 wherein the overlay mark is an outer box of a box-in-box alignment pattern.
12. The apparatus of claim 9 wherein the sub-resolution feature comprises a dummy gate stack.
13. The apparatus of claim 9 further comprising a semiconductor device having a gate stack disposed over the substrate.
14. The apparatus of claim 13 wherein the plurality of gate stacks, gate stack of the semiconductor device, and sub-resolution feature comprise a same material.
15. An integrated circuit device comprising:
a semiconductor substrate having an alignment region;
an alignment feature in the alignment region of the substrate, wherein the alignment feature has a width and a height that is substantially perpendicular to the width of the alignment mark, the height of the alignment mark being substantially constant across the entire width of the alignment feature;
a dummy feature disposed within the alignment feature, wherein a dimension of the dummy feature is less than a resolution of an alignment mark detector, wherein the dummy feature has a width and a height that is substantially perpendicular to the width of the dummy feature, the height of the dummy feature being substantially constant across the entire width of the dummy feature, wherein the height of the dummy feature is substantially the same as the height of the alignment feature; and
another alignment feature formed directly over the dummy feature such that a portion of said another alignment feature overlaps a portion of the dummy feature.
16. The integrated circuit device of claim 15 , wherein the dummy feature has a top surface extending across the entire width of the dummy feature and the alignment feature has a top surface extending across the entire width of the alignment feature, the top surface of the dummy feature being substantially coplanar with the top surface of the alignment feature.
17. The integrated circuit device of claim 15 , wherein the alignment feature is disposed within a first trench formed in a material layer, the alignment feature completely filling the first trench, and
wherein the dummy feature is disposed within a second trench formed in the material layer, the dummy feature completely filling the second trench.
18. The integrated circuit device of claim 15 , wherein the alignment feature includes a gate stack formed over the semiconductor substrate.
19. The integrated circuit device of claim 18 , wherein the dummy feature includes a gate stack formed over the semiconductor substrate.
20. The integrated circuit of claim 15 , wherein a bottom surface of said another alignment feature physically contacts a top surface of the dummy feature.