Sensing devices and techniques using 3-D arrays based on surface plasmon excitations

1. A method of fabricating a nanostructure device, the method comprising:

depositing a dielectric layer over a substrate;

depositing a silicon membrane layer over the dielectric layer;

depositing a photoresist layer over the membrane layer;

patterning the photoresist layer to generate a nanohole structure comprising multiple nanoholes;

dry etching to pattern the silicon membrane layer below the patterned photoresist layer;

wet etching to remove portions of the dielectric layer to create a channel;

using oblique deposition to place a metal layer on top of the nanohole structure of the photoresist layer to include openings over the nanoholes; and

integrating a fluidic channel over the nanostructure.

2. The method of claim 1 , further comprising controlling a size of the openings over the nanoholes.

3. A surface plasmon based sensing device, comprising:

a substrate;

a dielectric layer deposited over the substrate;

a silicon membrane layer deposited over the dielectric layer;

a photoresist layer deposited over the membrane layer and patterned to form a 3-dimensional composite metallodielectric nanoresonant array of nanoholes spaced from one another; and

a layer of a metallic film formed on the 3-dimensional composite metallodielectric nanoresonant array of nanoholes to include openings over the nanoholes respectively,

wherein the metal film is deposited using oblique deposition; and

a fluidic channel integrated over the nanostructure.

4. The surface plasmon based sensing device of claim 3 , wherein the 3-D composite metallodielectric nanoresonant array is structured to couple propagating surface plasmon polariton (SPP) waves and localized surface plasmon resonant (LSPR) modes.

5. The surface Plasmon based sensing device of claim 4 , wherein, in coupling SPP and LSPR,

the 3-D composite metallodielectric nanoresonant array is configured to use an enhanced surface electric field and micro-channel configuration to sense a molecule of interest.

6. The surface Plasmon based sensing device of claim 4 , wherein, in coupling SPP and LSPR,

the 3-D composite metallodielectric nanoresonant array is configured to monitor at least one location of the nanoholes to detect molecules near the nanoholes.

7. The surface Plasmon based sensing device of claim 4 , wherein, in coupling SPP and LSPR,

the 3-D composite metallodielectric nanoresonant array is configured to be in a through-hole fluidic configuration to detect small molecules.

8. The surface Plasmon based sensing device of claim 4 , wherein the 3-D composite metallodielectric nanoresonant array is configured in a pass-through configuration to allow molecules to pass through the nanoholes so as to allow the molecules to sense a maximal local electric field and yield maximal enhancement Raman detection.

9. The surface Plasmon based sensing device of claim 4 , wherein the 3-D composite metallodielectric nanoresonant array is configured in a pass-over configuration that includes a microfluidic channel over the 3-D composite metallodielectric nanoresonant array to allow molecules to pass over the nanoholes.

10. The surface Plasmon based sensing device of claim 4 , wherein the 3-D composite metallodielectric nanoresonant array is configured to

monitor SPP resonant shift over an area on the 3-D composite metallodielectric nanoresonant array surface to obtain quantity information of molecules on the surface; and

monitor Raman scattering from the nanoholes of the 3D metallodielectric nanoresonant array to identify the molecules.

11. The surface Plasmon based sensing device of claim 4 , wherein the 3-D composite metallodielectric nanoresonant array is configured to

monitor LSPR resonant shift over a single or multiple nanoholes to obtain quantity information of molecules near the nanoholes; and

monitor Raman scattering from the nanoholes of the 3D metallodielectric nanoresonant array to fast identify the molecules.