IP Library › Granted Patent US 851,613
Granted Patent S1
US 851,613 · App. 29/621,221 · Granted Jun 18, 2019

Target profile for a physical vapor deposition chamber target

Inventors: William Johanson (Gilroy, CA); Kirankumar Savandaiah (Bangalore, IN); Anthony Chih-Tang Chan (Sunnyvale, CA); Siew Kit Hoi (Singapore, SG); Prashant Prabhakar Prabhu (Karwar, IN)
Assignee: APPLIED MATERIALS, INC.
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Quick Facts
Patent No.
US 851,613
App. No.
29/621,221
Granted
Jun 18, 2019
Kind
S1
Claims (1)

The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 6, 2018
From: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
To: APPLIED MATERIALS, INC.
Reel/Frame 046004/0631 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2018
From: HOI, SIEW KIT
To: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
Reel/Frame 045302/0484 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2018
From: JOHANSON, WILLIAM; SAVANDAIAH, KIRANKUMAR; CHAN, ANTHONY CHIH-TANG; PRABHU, PRASHANT PRABHAKAR
To: APPLIED MATERIALS, INC.
Reel/Frame 045302/0666 →