Semiconductor device, method of manufacturing the same, and method of designing the same
Unless layers over a TEG pattern are removed, a test using the TEG pattern is conducted. Multiple wiring layers are formed over a first TEG pattern. A wiring and multiple dummy patterns are formed in each of the wiring layers. An electrode pad is formed in an uppermost wiring layer. In a planar view, the first TEG pattern eliminates overlap with all of the wirings and the dummy patterns.
1. A semiconductor device comprising:
a first TEG (test element group) pattern;
a plurality of wiring layers formed over the first TEG pattern;
a wiring and a plurality of dummy patterns formed over each of the wiring layers; and
an electrode pad formed in an uppermost wiring layer,
wherein the first TEG pattern eliminates overlap with all of the wirings and the dummy patterns in a planar view.
2. The semiconductor device according to claim 1 , further comprising: a plurality of dummy connection members that is formed between the first wiring layer and the second wiring layer located over the first wiring layer,
wherein at least one of the dummy connection members overlaps with the first TEG pattern.
3. The semiconductor device according to claim 1 , further comprising: a second TEG pattern that is formed in the first layer and has a pattern different from the first TEG pattern,
wherein the second TEG pattern overlaps with any one of the dummy patterns in the planar view.
4. The semiconductor device according to claim 1 ,
wherein the first TEG pattern is a TEG pattern for optical beam induced resistance change (OBIRCH).
5. The semiconductor device according to claim 4 , further comprising: a test electrode formed in the uppermost wiring layer, and coupled to the first TEG pattern through the patterns and the via holes formed in the wiring layers.
6. The semiconductor device according to claim 1 , further comprising:
a substrate; and
a transistor that is formed in the substrate and has a gate electrode,
wherein the gate electrode is formed in the first layer.
7. The semiconductor device according to claim 1 , further comprising:
a substrate; and
a transistor that is formed over the substrate,
wherein the first layer is located over the transistor.
8. A semiconductor device comprising:
a first TEG (test element group) pattern;
a plurality of wiring layers formed over the first TEG pattern;
a wiring and a plurality of dummy patterns formed over each of the wiring layers; and
an electrode pad formed in an uppermost wiring layer,
wherein the first TEG pattern eliminates overlap with all of the wirings and the dummy patterns in a planar view,
wherein the dummy patterns are disposed at positions sandwiching the first TEG pattern in the planar view.
9. A semiconductor device comprising:
a first TEG (test element group) pattern;
a plurality of wiring layers formed over the first TEG pattern;
a wiring and a plurality of dummy patterns formed over each of the wiring layers; and
an electrode pad formed in an uppermost wiring layer,
wherein the first TEG pattern eliminates overlap with all of the wirings and the dummy patterns in a planar view,
wherein the first TEG pattern is a TEG pattern for confirming a positional displacement in the planar view.