Piezoelectric thin-film resonator with distributed concave or convex patterns
A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode and an upper electrode that is located opposite the lower electrode across at least a part of the piezoelectric film. A mass load film is provided on the upper electrode. The mass load film includes a plurality of concave or convex patterns in at least a region that faces the lower electrode. The plurality of concave or convex patterns are densely arranged in a central portion of the region and are sparsely arranged in a peripheral portion of the region.
1. A piezoelectric thin-film resonator comprising:
a substrate;
a lower electrode provided on the substrate;
a piezoelectric film provided on the lower electrode; and
an upper electrode that is located opposite the lower electrode across at least a part of the piezoelectric film,
wherein a mass load film is provided on the upper electrode,
the mass load film includes a plurality of concave or convex patterns in at least a region that faces the lower electrode, and
the plurality of concave or convex patterns are densely arranged in a central portion of the region and are sparsely arranged in a peripheral portion of the region,
wherein the upper electrode has a plurality of concave or convex patterns that are to be fitted into the concave or convex patterns.
2. The piezoelectric thin-film resonator according to claim 1 , wherein a pitch of the concave or convex patterns is regularly varied so that the concave or convex patterns are densely arranged in the central portion of the region and are sparsely arranged in the peripheral portion of the region.
3. The piezoelectric thin-film resonator according to claim 1 , wherein the concave or convex patterns are island-like or hole-like dot patterns.
4. A communication module comprising the piezoelectric thin-film resonator according to claim 1 .