Coating apparatus
A coating apparatus includes a chamber device and a transporting device. The chamber device defines two coating chambers, two parallel coating channels, and a transportation channel communicating with the coating channels. The coating chambers are separated from each other. The coating chambers and the coating channels are alternately arranged. Each coating chamber defines at least one coating slot communicating with the respective coating channel. The transporting device includes a shaft rotatable with respect to the chamber device and a carrying board fixed on the shaft. The shaft is axially movable in the transportation channel. The carrying board is receivable in each of the coating channels for exposing a substrate to the corresponding coating chamber via the associated coating slot. The carrying board is rotatable about the shaft in each of the coating channels and jointly movable with the shaft in and along the transportation channel between the coating channels.
1. A coating apparatus, comprising:
a chamber device comprising a chamber body and a chamber door;
the chamber body comprising a front surface, and two coating chambers, two parallel coating channels, and a transportation channel communicating with the coating channels all defined in the front surface, the coating chambers separated from each other, the coating chambers and the coating channels alternately arranged, each coating chamber defining at least one coating slot communicating with the respective coating channel; and
the chamber door being hinged to the chamber body to open or close the coating chambers, and being configured for covering the front surface; and
a transporting device comprising a shaft rotatable with respect to the chamber device and a carrying board fixed on the shaft, the shaft axially movable in the transportation channel, the carrying board receivable in each of the coating channels for exposing a substrate to the corresponding coating chamber via the associated coating slot, the carrying board rotatable about the shaft in each of the coating channels and jointly movable with the shaft in and along the transportation channel between the coating channels.
2. The coating apparatus of claim 1 , wherein the coating channels and the transportation channel cooperatively define an opening in the front surface; and the chamber device further comprises a sealing element attached to the chamber door to hermetically seal the opening when the chamber door is closed.
3. The coating apparatus of claim 1 , wherein the chamber device comprises a bottom plate having a hole defined therein, and the shaft extends through and is moveable along the hole.
4. The coating apparatus of claim 1 , further comprising a motor to drive the shaft to rotate relative to the chamber device.
5. The coating apparatus of claim 4 , further comprising a platform for bearing the motor and for raising or lowering the shaft.
6. The coating apparatus of claim 4 , further comprising another motor to drive the shaft to move along the transportation channel.
7. The coating apparatus of claim 6 , wherein the another motor is arranged above the shaft and includes a rotating shaft and a cord, the cord is interconnected between the rotating shaft and the shaft, and the another motor is configured to drive the rotating shaft to wind or unwind the cord therearound whereby the cord drives the shaft to move vertically along the transportation channel.
8. The coating apparatus of claim 1 , wherein the carrying board defines at least one receiving groove for receiving the substrate.
9. The coating apparatus of claim 8 , wherein the at least one receiving groove comprises two receiving grooves arranged at opposite sides of the center of the carrying board.
10. The coating apparatus of claim 8 , wherein the at least one receiving groove comprises two receiving grooves arranged on the same side of the carrying board, and the at least one coating slot comprises two coating slots corresponding to the two receiving grooves.
11. The coating apparatus of claim 1 , wherein the coating chambers are at opposite sides of the transportation channel.
12. The coating apparatus of claim 1 , wherein the transportation channel is substantially perpendicular to the coating channels.
13. A coating apparatus, comprising:
a chamber device comprising a chamber body and a chamber door;
the chamber body comprising a front surface, and a first coating chamber, a second coating chamber separated from the first coating chamber, and a coating channel all defined in the front surface, the two coating chambers juxtaposed and above the coating channel, each coating chamber defining at least one coating slot communicating to the coating channel; and
the chamber door being hinged to the chamber body to open or close the first and second coating chambers, and being configured for covering the front surface; and
a transporting device comprising a shaft rotatable with respect to the chamber device and a carrying board fixed on the shaft, the shaft axially movable in the coating channel, the carrying board receivable in the coating channel for exposing a substrate to the corresponding chamber via the associated coating slot, the carrying board rotatable about the shaft in the coating channel and jointly movable with the shaft in and along the coating channel.
14. The coating apparatus of claim 13 , wherein the carrying board defines at least one receiving groove for receiving the substrate.
15. The coating apparatus of claim 14 , wherein the at least one receiving groove comprises two receiving grooves arranged at opposite sides of the center of the carrying board.
16. The coating apparatus of claim 14 , wherein the at least one receiving groove comprises two receiving grooves arranged on the same side of the carrying board, and the at least one coating slot comprises two coating slots corresponding to the two receiving grooves.