Solid state image capture device and method for manufacturing same
According to one embodiment, a solid state image capture device includes a multilayered interconnect layer, a semiconductor substrate, a pillar diffusion layer and an insulating member. The multilayered interconnect layer includes an interconnect. The semiconductor substrate is provided on the multilayered interconnect layer and the semiconductor substrate has a through-trench. The pillar diffusion layer is formed in the semiconductor substrate around the through-trench. In addition, an insulating member is filled into the through-trench.
1. A solid state image capture device, comprising:
a multilayered interconnect layer including an interconnect;
a semiconductor substrate on the multilayered interconnect layer, the semiconductor substrate being formed of monocrystalline silicon and having a first conductivity layer, a first through-trench, a second through-trench and a third through-trench adjacent to the first through-trench;
a first pillar diffusion layer in the semiconductor substrate around the first through-trench, the first pillar diffusion layer being connected to the interconnect;
a second pillar diffusion layer in the semiconductor substrate around the second through-trench;
a third pillar diffusion layer in the semiconductor substrate around the third through-trench;
an insulating member in each of the first and second through-trenches, the insulating member being formed of silicon oxide;
a first impurity diffusion region of a second conductivity type partitioning the first conductivity layer into a plurality of regions;
a second impurity diffusion region of the second conductivity type provided between the first and third pillar diffusion layers;
an electrode pad on the semiconductor substrate and connected to the first pillar diffusion layer, the electrode pad being connected to the interconnect through the third pillar diffusion layer and the second impurity diffusion region; and
a color filter on the semiconductor substrate for each of the partitioned regions,
the electrode pad and the color filter being provided on a side on which light is incident, and
the multilayered interconnect layer being provided on a side opposite to the side on which light is incident.
2. The device according to claim 1 , wherein the first to third through-trenches have a quadrilateral columnar configuration.
3. The device according to claim 1 , wherein the first to third through-trenches have a circular columnar configuration.
4. The device according to claim 1 , wherein the first to third pillar diffusion layers are of the first conductivity type.
5. The device according to claim 1 , further comprising a support substrate over a lower face of the multilayered interconnect layer.
6. The device according to claim 1 , wherein the first, second and third pillar diffusion layers have the same conductivity type.
7. The device according to claim 1 , wherein the first, second and third pillar diffusion layers have the same impurity concentration.