Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
A silica glass crucible used for pulling up a silicon single crystal and made from natural silica a raw material is provided with a region within a certain range from the center of a bottom section of the crucible and up to 0.5 mm deep from an inner surface and which substantially does not include gas bubbles, wherein an average value of a concentration of Al included in a region within the certain range from the center of the bottom section of the crucible and up to 0.5 mm deep from the inner surface is 30 ppm or more and 150 ppm or less. In the case where the inner layer of the crucible bottom section is formed in this way, dents in the inner surface are prevented and the generation of gas bubbles is reduced.
1. A silica glass crucible used for pulling up a silicon single crystal and made from natural silica as a raw material, comprising:
A first region extending a first distance from a center of a bottom section of the crucible and up to 0.5 mm deep from an inner surface and which substantially does not include bubbles; and
a second region extending a second distance from the center of the bottom section of the crucible and up to 40 μm deep from the inner surface, wherein:
the second distance is less than the first distance, and
an average value of a concentration of Al included in the second region is 30 ppm or more and 150 ppm or less.
2. The silica glass crucible as claimed in claim 1 , wherein a total concentration of three elements Na, K and Li included in the second region within the second distance from the center of the bottom section of the crucible and up to 40 μm deep from the inner surface is 0.3 ppm or less.
3. The silica glass crucible as claimed in claim 1 , wherein a total concentration of the three elements Na, K and Li included in the second region within the second distance from the center of the bottom section of the crucible is 0.3 ppm or less.
4. The silica glass crucible as claimed in claim 1 , wherein a concentration of Al included in the second region within the second distance from the center of the bottom section of the crucible and 100 μm or more deep from the inner surface is 16 ppm or less.
5. The silica glass crucible as claimed in claim 1 , wherein the second region within the second distance from the center of the bottom section of the crucible is a region within 50% of a diameter of the crucible from the bottom section.
6. A method for manufacturing a silica glass crucible, comprising:
depositing natural silica powder on an inner surface of a rotating mold;
forming a silica glass crucible by arc melting the natural silica powder; and
etching an inner surface of the silica glass crucible so that an average value of a concentration of Al included in a region extending from the center of a bottom section to before a rim of the silica glass crucible, and further extending up to 40 μm deep from an inner surface of the silica glass crucible, becomes 30 ppm or more and 150 ppm or less.
7. The method for manufacturing a silica glass crucible as claimed in claim 6 , wherein forming the silica glass crucible further includes electrolytic refining within the arc melting so that a total concentration of three elements Na, K and Li included in the region becomes 0.3 ppm or less after etching.