Method and structure having monolithic heterogeneous integration of compound semiconductors with elemental semiconductor
A semiconductor structure having compound semiconductor (CS) device formed in a compound semiconductor of the structure and an elemental semiconductor device formed in an elemental semiconductor layer of the structure. The structure includes a layer having an elemental semiconductor device is disposed over a buried oxide (BOX) layer. A selective etch layer is disposed between the BOX layer and a layer for a compound semiconductor device. The selective etch layer enables selective etching of the BOX layer to thereby maximize vertical and lateral window etch process control for the compound semiconductor device grown in etched window. The selective etch layer has a lower etch rate than the etch rate of the BOX layer.
1. A semiconductor structure comprising:
a column III-V compound semiconductor growth support;
a column III-V compound semiconductor device disposed on the support;
a dielectric layer;
a silicon layer having a CMOS semiconductor device disposed over the dielectric layer;
a selective etch layer disposed between the dielectric layer and the support; and
wherein the selective etch layer has a lower etch rate to a fluorine containing plasma etch than the etch rate of the dielectric layer has to the fluorine containing plasma etch; and
wherein the selective etch layer is aluminum oxide (Al2O3), or aluminum nitride (AlN), or a plurality of layers having combinations of aluminum oxide (Al2O3), and aluminum nitride (AlN).
2. The semiconductor structure recited in claim 1 wherein the support is silicon, SiC or sapphire.
3. The semiconductor structure recited in claim 1 wherein the support is a compound or elemental semiconductor.
4. The semiconductor structure recited in claim 1 wherein the support is Si, Ge, InP, GaAs, GaN, or AlN.
5. The semiconductor structure recited in claim 1 wherein the dielectric layer is silicon dioxide.
6. The semiconductor structure recited in claim 1 wherein the silicon layer is disposed over the selective etch layer, the silicon layer having disposed in portions thereof the column III-V semiconductor layer; and wherein the structure has a window formed through other portions of the silicon layer and underlying portions of the selective etch layer exposes a portion of the support; and
wherein the column III-V semiconductor layer is disposed on the exposed portion of the support.
7. A semiconductor structure having CMOS transistors and a compound semiconductor device, comprising:
a column III-V semiconductor growth support;
a column III-V semiconductor device disposed on the support;
selective etch layer is disposed over the compound semiconductor growth support;
wherein the selective etch layer has a lower etch rate to a fluorine containing plasma etch than the etch rate of the dielectric layer has to the fluorine containing plasma etch, wherein the selective etch layer is aluminum oxide (Al2O3), aluminum nitride (AlN), or a plurality of layers having combinations of aluminum oxide (Al2O3), aluminum nitride (AlN);
a silicon layer is disposed over the selective etch layer, the silicon layer having disposed in portions thereof the CMOS transistors;
wherein a window formed through other portions of the silicon layer and underlying portions of the selective etch layer exposes a portion of the compound semiconductor growth support; and
wherein the compound semiconductor is disposed on the exposed portion of the compound semiconductor growth support.
8. The semiconductor structure recited in claim 7 wherein the support is silicon, SiC or sapphire.
9. The semiconductor structure recited in claim 7 wherein the support is a compound or elemental semiconductor.
10. The semiconductor structure recited in claim 7 wherein the support is Si, Ge, InP, GaAs, GaN, or AlN.