High sheet resistor in CMOS flow
An integrated circuit containing CMOS gates and a counterdoped polysilicon gate material resistor which has a body region that is implanted concurrently with the NSD layers of the NMOS transistors of the CMOS gates and concurrently with the PSD layers of the PMOS transistors of the CMOS gates, and has a resistor silicide block layer over the body region which is formed of separate material from the sidewall spacers on the CMOS gates. A process of forming an integrated circuit containing CMOS gates and a counterdoped polysilicon gate material resistor which implants the body region of the resistor concurrently with the NSD layers of the NMOS transistors of the CMOS gates and concurrently with the PSD layers of the PMOS transistors of the CMOS gates, and forms a resistor silicide block layer over the body region of separate material from the sidewall spacers on the CMOS gates.
1. A process of forming an integrated circuit, comprising the steps:
providing a substrate;
forming a gate dielectric layer on said substrate;
forming a gate polysilicon layer over said substrate and said gate dielectric layer;
etching said gate polysilicon layer to form:
an NMOS gate and a PMOS gate on said gate dielectric layer; and
a resistor layer, said resistor layer having a body region and having head regions at each end of said body region;
forming sidewall spacers abutting said NMOS gate and abutting said PMOS gate;
forming an NSD implant mask over said substrate which:
exposes said NMOS gate and said substrate adjacent to said NMOS gate;
exposes said body region of said resistor layer; and
covers said PMOS gate and said substrate adjacent to said PMOS gate
performing an NSD implant operation which implants n-type dopants into said substrate adjacent to said NMOS gate to form NSD layers and into said body region of said resistor layer;
forming a PSD implant mask over said substrate which:
exposes said PMOS gate and said substrate adjacent to said PMOS gate;
exposes said body region of said resistor layer; and
covers said NMOS gate and said substrate adjacent to said NMOS gate
performing a PSD implant operation which implants p-type dopants into said substrate adjacent to said PMOS gate to form PSD layers and into said body region of said resistor layer;
forming a resistor silicide block layer over said body region of said resistor layer, such that said resistor silicide block layer includes different dielectric material than said sidewall spacers;
forming metal silicide layers on said head regions of said resistor layer, on said NSD layers adjacent to said NMOS gate, and on said PSD layers adjacent to said PMOS gate;
forming a PMD layer over said silicide layers and over said resistor silicide block layer; and
forming contacts through said PMD layer, said contacts making electrical connection to said silicide layers on said NSD layers and to said silicide layers on said PSD layers.
2. The process of claim 1 , in which said resistor silicide block layer includes silicon dioxide.
3. The process of claim 1 , further including steps:
forming an n-channel lightly doped drain (NLDD) implant mask over said substrate, after said step of etching said gate polysilicon layer and prior to said step of forming said sidewall spacers, which:
exposes said NMOS gate and said substrate adjacent to said NMOS gate;
covers said body region of said resistor layer; and
covers said PMOS gate and said substrate adjacent to said PMOS gate;
performing an NLDD implant operation which implants n-type dopants into said substrate adjacent to said NMOS gate to form NLDD layers;
forming a p-channel lightly doped drain (PLDD) implant mask over said substrate, after said step of etching said gate polysilicon layer and prior to said step of forming said sidewall spacers, which:
exposes said PMOS gate and said substrate adjacent to said PMOS gate;
covers said body region of said resistor layer; and
covers said NMOS gate and said substrate adjacent to said NMOS gate; and
performing a PLDD implant operation which implants p-type dopants into said substrate adjacent to said PMOS gate to form PLDD layers.
4. The process of claim 3 , in which:
said NLDD implant mask covers said head regions of said resistor layer; and
said PLDD implant mask covers said head regions of said resistor layer.
5. The process of claim 3 , in which:
said body region of said resistor layer is p-type;
said head regions of said resistor layer are p-type;
said NLDD implant mask covers said head regions of said resistor layer;
said PLDD implant mask covers said head regions of said resistor layer;
said NSD implant mask covers said head regions of said resistor layer; and
said PSD implant mask exposes said head regions of said resistor layer so that said PSD implant operation implants p-type dopants into said head regions.
6. The process of claim 3 , in which:
said body region of said resistor layer is n-type;
said head regions of said resistor layer are n-type;
said NLDD implant mask covers said head regions of said resistor layer;
said PLDD implant mask covers said head regions of said resistor layer;
said NSD implant mask exposes said head regions of said resistor layer so that said NSD implant operation implants n-type dopants into said head regions; and
said PSD implant mask covers said head regions of said resistor layer.
7. The process of claim 3 , in which:
said body region of said resistor layer is p-type;
said head regions of said resistor layer are p-type;
said NLDD implant mask covers said head regions of said resistor layer;
said PLDD implant mask exposes said head regions of said resistor layer so that said PLDD implant operation implants p-type dopants into said head regions;
said NSD implant mask exposes said head regions of said resistor layer so that said NSD implant operation implants n-type dopants into said head regions; and
said PSD implant mask exposes said head regions of said resistor layer so that said PSD implant operation implants p-type dopants into said head regions.
8. The process of claim 3 , in which:
said body region of said resistor layer is n-type;
said head regions of said resistor layer are n-type;
said NLDD implant mask exposes said head regions of said resistor layer so that said NLDD implant operation implants n-type dopants into said head regions;
said PLDD implant mask covers said head regions of said resistor layer;
said NSD implant mask exposes said head regions of said resistor layer so that said NSD implant operation implants n-type dopants into said head regions; and
said PSD implant mask exposes said head regions of said resistor layer so that said PSD implant operation implants p-type dopants into said head regions.
9. The process of claim 1 , in which:
said body region of said resistor layer is p-type;
said head regions of said resistor layer are p-type;
said NLDD implant mask covers said head regions of said resistor layer;
said PLDD implant mask exposes said head regions of said resistor layer so that said PLDD implant operation implants p-type dopants into said head regions;
said NSD implant mask covers said head regions of said resistor layer; and
said PSD implant mask exposes said head regions of said resistor layer so that said PSD implant operation implants p-type dopants into said head regions.
10. The process of claim 1 , further including steps:
forming an n-channel lightly doped drain (NLDD) implant mask over said substrate, after said step of etching said gate polysilicon layer and prior to said step of forming said sidewall spacers, which:
exposes said NMOS gate and said substrate adjacent to said NMOS gate;
exposes said body region of said resistor layer; and
covers said PMOS gate and said substrate adjacent to said PMOS gate;
performing an NLDD implant operation which implants n-type dopants into said substrate adjacent to said NMOS gate to form NLDD layers and into said body region;
forming a p-channel lightly doped drain (PLDD) implant mask over said substrate, after said step of etching said gate polysilicon layer and prior to said step of forming said sidewall spacers, which:
exposes said PMOS gate and said substrate adjacent to said PMOS gate;
covers said body region of said resistor layer; and
covers said NMOS gate and said substrate adjacent to said NMOS gate; and
performing a PLDD implant operation which implants p-type dopants into said substrate adjacent to said PMOS gate to form PLDD layers.
11. The process of claim 1 , further including steps:
forming an n-channel lightly doped drain (NLDD) implant mask over said substrate, after said step of etching said gate polysilicon layer and prior to said step of forming said sidewall spacers, which:
exposes said NMOS gate and said substrate adjacent to said NMOS gate;
covers said body region of said resistor layer; and
covers said PMOS gate and said substrate adjacent to said PMOS gate;
performing an NLDD implant operation which implants n-type dopants into said substrate adjacent to said NMOS gate to form NLDD layers;
forming a p-channel lightly doped drain (PLDD) implant mask over said substrate, after said step of etching said gate polysilicon layer and prior to said step of forming said sidewall spacers, which:
exposes said PMOS gate and said substrate adjacent to said PMOS gate;
exposes said body region of said resistor layer; and
covers said NMOS gate and said substrate adjacent to said NMOS gate; and
performing a PLDD implant operation which implants p-type dopants into said substrate adjacent to said PMOS gate to form PLDD layers and into said body region.
12. The process of claim 1 , further including steps:
forming an n-type pre gate etch implant mask over said substrate, after said step of forming said gate polysilicon layer and prior to said step of etching said gate polysilicon layer, which:
exposes an area for said NMOS gate;
exposes an area for said body region of said resistor layer; and
covers an area for said PMOS gate; and
performing an n-type pre gate etch implant operation which implants n-type dopants into said gate polysilicon layer in said area for said NMOS gate and into said area for said body region.
13. The process of claim 1 , further including steps:
forming a p-type pre gate etch implant mask over said substrate, after said step of forming said gate polysilicon layer and prior to said step of etching said gate polysilicon layer, which:
exposes an area for said PMOS gate;
exposes an area for said body region of said resistor layer; and
covers an area for said NMOS gate; and
performing a p-type pre gate etch implant operation which implants p-type dopants into said gate polysilicon layer in said area for said PMOS gate and into said area for said body region.
14. The process of claim 1 , further including steps:
forming an other component implant mask over said substrate, which:
exposes an area for an other component in said integrated circuit;
cover an area for said PMOS gate;
cover an area for said body region of said resistor layer; and
covers an area for said NMOS gate; and
performing an other component implant operation which implants dopants into said area for said other component.
15. The process of claim 1 , in which:
said body region of said resistor layer is p-type; and
said head regions of said resistor layer are p-type.
16. The process of claim 1 , in which an average density of p-type dopants in said head regions of said resistor layer is at least 10 percent greater than an average density of p-type dopants in said body region of said resistor layer.