Unit pixel of image sensor and photo detector thereof
View Patent ↗A unit pixel of an image sensor and a photo detector are disclosed. The photo detector can include: a substrate in which a V-shaped groove having a predetermined angle is formed; a light-absorbing part formed in a floated structure above the V-shaped groove and to which light is incident; an oxide film formed between the light-absorbing part and the V-shaped groove and in which tunneling occurs; a source formed adjacent to the oxide film on a slope of one side of the V-shaped groove and separated from the light-absorbing part by the oxide film; a drain formed adjacent to the oxide film on a slope of the other side of the V-shaped groove and separated from the light-absorbing part by the oxide film; and a channel interposed between the source and the drain along the V-shaped groove to form flow of an electric current between the source and the drain.
1. A photo detector configured to absorb light in a unit pixel of an image sensor transforming the absorbed light to an electrical signal, comprising:
a substrate in which a V-shaped groove having a predetermined angle is formed;
a light-absorbing part formed in a floated structure above the V-shaped groove, light being incident to the light-absorbing part;
an oxide film formed in between the light-absorbing part and the V-shaped groove, tunneling occurring in the oxide film;
a source formed adjacent to the oxide film on a slope of one side of the V-shaped groove and separated from the light-absorbing part by the oxide film;
a drain formed adjacent to the oxide film on a slope of the other side of the V-shaped groove and separated from the light-absorbing part by the oxide film; and
a channel interposed between the source and the drain along the V-shaped groove and configured to form flow of an electric current between the source and the drain,
wherein the light-absorbing part is doped with first type impurities, and the source and the drain are doped with second type impurities,
wherein the light-absorbing part is insulated from the source and the drain by the oxide film,
wherein electron-hole pairs are generated in the light-absorbing part by the light incident to the light-absorbing part, tunneling occurs in between at least one of the source and drain and the light-absorbing part by an electric field concentrated in the oxide film, electrons of the electron-hole pairs are moved to at least one of the source and the drain from the light-absorbing part by the tunneling, and the flow of the electric current of the channel is controlled by a change in the quantity of electric charge of the light-absorbing part caused by the moving of the electrons.
2. The photo detector of claim 1 , wherein the substrate is a {100} type silicon substrate, and the V-shaped groove is formed on the substrate by anisotropic etching.
3. The photo detector of claim 1 , wherein the channel is formed in a state immediately before pinch-off by adjusting a W/L ratio, which is a ratio between a width (W) and a length (L) of the channel.
4. The photo detector of claim 1 , wherein the source and the drain are formed by doping the second type impurities in a body, and the body is floated.
5. The photo detector of claim 1 , wherein a threshold voltage of the photo detector is changed due to the tunneling occurred in the oxide film.
6. The photo detector of claim 1 , further comprising a light-blocking layer formed on a surface other than the light-absorbing part and configured to block transmission of light in areas other than the light-absorbing part.
7. A unit pixel of an image sensor configured to transform absorbed light to an electrical signal, comprising:
a photo detector configured to cause an electric current to flow using a change in the quantity of electric charge caused by incident light; and
a select device configured to output the electric current generated by the photo detector to a unit pixel output terminal,
wherein the photo detector comprises:
a substrate in which a V-shaped groove having a predetermined angle is formed;
a light-absorbing part formed in a floated structure above the V-shaped groove, light being incident to the light-absorbing part;
an oxide film formed in between the light-absorbing part and the V-shaped groove, tunneling occurring in the oxide film;
a source formed adjacent to the oxide film on a slope of one side of the V-shaped groove and separated from the light-absorbing part by the oxide film;
a drain formed adjacent to the oxide film on a slope of the other side of the V-shaped groove and separated from the light-absorbing part by the oxide film; and
a channel interposed between the source and the drain along the V-shaped groove and configured to form flow of an electric current between the source and the drain,
wherein the select device comprises: a drain being connected with the source of the photo detector; a source being accessed to the unit pixel output terminal; and a gate configured to receive a control signal from an outside, and a switching operation is performed based on the control signal,
wherein the light-absorbing part is doped with first type impurities, and the source and the drain are doped with second type impurities,
wherein the light-absorbing part is insulated from the source and the drain by the oxide film, and
wherein electron-hole pairs are generated in the light-absorbing part by the light incident to the light-absorbing part, tunneling occurs in between at least one of the source and drain and the light-absorbing part by an electric field concentrated in the oxide film, electrons of the electron-hole pairs are moved to at least one of the source and the drain from the light-absorbing part by the tunneling, and the flow of the electric current of the channel is controlled by a change in the quantity of electric charge of the light-absorbing part caused by the moving of the electrons.
8. The unit pixel of claim 7 , wherein the substrate is a {100} type silicon substrate, and the V-shaped groove is formed on the substrate by anisotropic etching.
9. The unit pixel of claim 7 , wherein the source of the photo detector and the drain of the select device are formed in a same active area.
10. The unit pixel of claim 7 , wherein the channel is formed in a state immediately before pinch-off by adjusting a W/L ratio, which is a ratio between a width (W) and a length (L) of the channel.
11. A photo detector configured to absorb light in a unit pixel of an image sensor transforming the absorbed light to an electrical signal, comprising:
a substrate in which a U-shaped groove having a predetermined angle is formed;
a light-absorbing part formed in a floated structure above the U-shaped groove, light being incident to the light-absorbing part;
an oxide film formed in between the light-absorbing part and the U-shaped groove, tunneling occurring in the oxide film;
a source formed adjacent to the oxide film on a slope of one side of the U-shaped groove and separated from the light-absorbing part by the oxide film;
a drain formed adjacent to the oxide film on a slope of the other side of the U-shaped groove and separated from the light-absorbing part by the oxide film; and
a channel interposed between the source and the drain in a lower area of the U-shaped groove and configured to form flow of an electric current between the source and the drain,
wherein the light-absorbing part is doped with first type impurities, and the source and the drain are doped with second type impurities,
wherein the light-absorbing part is insulated from the source and the drain by the oxide film,
wherein electron-hole pairs are generated in the light-absorbing part by the light incident to the light-absorbing part, tunneling occurs in between at least one of the source and drain and the light-absorbing part by an electric field concentrated in the oxide film, electrons of the electron-hole pairs are moved to at least one of the source and the drain from the light-absorbing part by the tunneling, and the flow of the electric current of the channel is controlled by a change in the quantity of electric charge of the light-absorbing part caused by the moving of the electrons.
12. The photo detector of claim 11 , wherein the substrate is a {100} type silicon substrate, and the U-shaped groove is formed on the substrate by anisotropic etching to have a slope with a predetermined depth.
13. The photo detector of claim 11 , wherein the channel is formed in a state immediately before pinch-off by adjusting a W/L ratio, which is a ratio between a width (W) and a length (L) of the channel.
14. The photo detector of claim 11 , wherein the source and the drain are formed by doping the second type impurities in a body, and the body is floated.
15. The photo detector of claim 11 , wherein a threshold voltage of the photo detector is changed due to the tunneling occurred in the oxide film.
16. The photo detector of claim 11 , further comprising a light-blocking layer formed on a surface other than the light-absorbing part and configured to block transmission of light in areas other than the light-absorbing part.
17. A unit pixel of an image sensor configured to transform absorbed light to an electrical signal, comprising:
a photo detector configured to cause an electric current to flow using a change in the quantity of electric charge caused by incident light; and
a select device configured to output the electric current generated by the photo detector to a unit pixel output terminal,
wherein the photo detector comprises:
a substrate in which a U-shaped groove having a predetermined angle is formed; a light-absorbing part formed in a floated structure above the U-shaped groove, light being incident to the light-absorbing part;
an oxide film formed in between the light-absorbing part and the U-shaped groove, tunneling occurring in the oxide film;
a source formed adjacent to the oxide film on a slope of one side of the U-shaped groove and separated from the light-absorbing part by the oxide film;
a drain formed adjacent to the oxide film on a slope of the other side of the U-shaped groove and separated from the light-absorbing part by the oxide film; and
a channel interposed between the source and the drain in a lower area of the U-shaped groove and configured to form flow of an electric current between the source and the drain,
wherein the select device comprises: a drain being connected with the source of the photo detector; a source being accessed to the unit pixel output terminal; and a gate configured to receive a control signal from an outside, and a switching operation is performed based on the control signal,
wherein the light-absorbing part is doped with first type impurities, and the source and the drain are doped with second type impurities,
wherein the light-absorbing part is insulated from the source and the drain by the oxide film, and
wherein electron-hole pairs are generated in the light-absorbing part by the light incident to the light-absorbing part, tunneling occurs in between at least one of the source and drain and the light-absorbing part by an electric field concentrated in the oxide film, electrons of the electron-hole pairs are moved to at least one of the source and the drain from the light-absorbing part by the tunneling, and the flow of the electric current of the channel is controlled by a change in the quantity of electric charge of the light-absorbing part caused by the moving of the electrons.
18. The unit pixel of claim 17 , wherein the source of the photo detector and the drain of the select device are formed in a same active area.
19. The unit pixel of claim 17 , wherein the substrate is a {100} type silicon substrate, and the U-shaped groove is formed on the substrate by anisotropic etching.
20. The unit pixel of claim 17 , wherein the channel is formed in a state immediately before pinch-off by adjusting a W/L ratio, which is a ratio between a width (W) and a length (L) of the channel.