Semiconductor device capable of restricting coil extension direction and manufacturing method thereof
In a manufacturing method for a semiconductor device having a coil layer part on a substrate, two support substrates each having a flat surface are prepared, and a component member is formed on the flat surface of each of the support substrates. The component member includes a wiring portion having a predetermined pattern and an insulation film surrounding the wiring portion. The wiring portion is provided with a connecting portion exposing from the insulation film. A coil layer part is formed by opposing and bonding the component members formed on the support substrates to each other while applying pressure in a condition where the flat surfaces of the support substrates are parallel to each other. A coil is formed in the coil layer part by connecting the wiring portions through the connecting portions.
1. A semiconductor device, comprising:
a board having a surface; and
a coil layer part disposed on the surface of the board, the coil layer part constructed of a plurality of component members and including a coil defining an axis in a direction of a normal to the surface of the board, wherein
each of the component members includes a wiring portion having a predetermined pattern and an insulation film surrounding the wiring portion,
each wiring portion is provided with a connecting portion exposing from the respective insulation film,
the coil is constructed of the wiring portions connected to each other through the connecting portions,
the coil layer part is formed by bonding the component members disposed on surfaces of support substrates to each other such that the wiring portions are connected to each other through the connecting portions while maintaining the surfaces of the support substrates parallel to each other,
the coil layer part has an accommodation space between adjacent component members, and
the accommodation space is provided by a recess defined in a surface portion of the insulation film of at least one of the adjacent component members.
2. The semiconductor device according to claim 1 , wherein
the recess is located in an area opposing to the wiring portion other than a portion from which the connecting portion exposes.
3. The semiconductor device according to claim 1 , wherein
the recess is located in an area corresponding to an inside of the coil.
4. The semiconductor device according to claim 1 wherein
the recess has a continuous shape having an opening at an outer end of the component member, the opening allowing communication between the accommodation space and an outside of the coil layer part.