Method for manufacturing SOI substrate and semiconductor device
It is an object of the present invention to provide a method for manufacturing an SOI substrate having an SOI layer that can be used in practical applications with high yield even when a flexible substrate such as a glass substrate or a plastic substrate is used. Further, it is another object of the present invention to provide a method for manufacturing a thin semiconductor device using such an SOI substrate with high yield. When a single-crystal semiconductor substrate is bonded to a flexible substrate having an insulating surface and the single-crystal semiconductor substrate is separated to manufacture an SOI substrate, one or both of bonding surfaces are activated, and then the flexible substrate having an insulating surface and the single-crystal semiconductor substrate are attached to each other.
1. A method for manufacturing a device, comprising:
forming an insulating layer over a first substrate;
forming a fragile region including an element at a predetermined depth in a single-crystal semiconductor substrate;
bonding the single-crystal semiconductor substrate and the first substrate to each other with the insulating layer therebetween;
separating the single-crystal semiconductor substrate by a heat treatment such that a single-crystal semiconductor layer is left over the first substrate;
forming a semiconductor element using the single-crystal semiconductor layer;
attaching the first substrate and a second substrate with the semiconductor element therebetween; and
separating the first substrate such that the semiconductor element is left over the second substrate.
2. The method for manufacturing a device according to claim 1 ,
wherein a separation layer is located between the first substrate and the insulating layer, and
wherein the separation layer comprises one material selected from the group consisting of tungsten, molybdenum, titanium, tantalum, niobium, nickel, cobalt, zirconium, zinc, ruthenium, rhodium, palladium, osmium and iridium.
3. The method for manufacturing a device according to claim 1 , wherein the element is hydrogen.
4. The method for manufacturing a device according to claim 1 , wherein the insulating layer is silicon oxide formed by a chemical vapor deposition using an organic silane.
5. The method for manufacturing a device according to claim 1 , wherein the second substrate is flexible and has an insulating surface.
6. The method for manufacturing a device according to claim 1 , wherein the heat treatment is performed at temperatures of greater than or equal to 250° C. and less than 400° C.
7. The method for manufacturing a device according to claim 1 , wherein the single-crystal semiconductor substrate is a single-crystal substrate of one selected from the group consisting of silicon, germanium, silicon germanium, gallium arsenide and indium phosphide.
8. The method for manufacturing a device according to claim 1 , wherein the step of forming the fragile region is conducted by irradiating the single-crystal semiconductor substrate with ions of an element.
9. A method for manufacturing a device, comprising:
forming an insulating layer over a first substrate;
bonding a single-crystal semiconductor substrate including a fragile layer and the first substrate to each other, with the insulating layer therebetween, wherein the fragile layer includes an element at a predetermined depth;
separating the single-crystal semiconductor substrate by a heat treatment such that a single-crystal semiconductor layer is left over the first substrate;
forming a semiconductor element using the single-crystal semiconductor layer;
attaching the first substrate and a second substrate with the semiconductor element therebetween; and
separating the first substrate such that the semiconductor element is left over the second substrate.
10. The method for manufacturing a device according to claim 9 ,
wherein a separation layer is located between the first substrate and the insulating layer, and
wherein the separation layer comprises one material selected from the group consisting of tungsten, molybdenum, titanium, tantalum, niobium, nickel, cobalt, zirconium, zinc, ruthenium, rhodium, palladium, osmium and iridium.
11. The method for manufacturing a device according to claim 9 , wherein the element is hydrogen.
12. The method for manufacturing a device according to claim 9 , wherein the insulating layer is silicon oxide formed by a chemical vapor deposition using an organic silane.
13. The method for manufacturing a device according to claim 9 , wherein the second substrate is flexible and has an insulating surface.
14. The method for manufacturing a device according to claim 9 , wherein the heat treatment is performed at temperatures of greater than or equal to 250° C. and less than 400° C.
15. The method for manufacturing a device according to claim 9 , wherein the single-crystal semiconductor substrate is a single-crystal substrate of one selected from the group consisting of silicon, germanium, silicon germanium, gallium arsenide and indium phosphide.
16. A method for manufacturing a device, comprising:
forming a semiconductor element using a single-crystal semiconductor layer over a first substrate, wherein an insulating layer and a bonding interface are located between the single-crystal semiconductor layer and the first substrate;
attaching the first substrate and a second substrate with the semiconductor element therebetween; and
separating the first substrate such that the semiconductor element is left over the second substrate.
17. The method for manufacturing a device according to claim 16 ,
wherein a separation layer is located between the first substrate and the insulating layer, and
wherein the separation layer comprises one material selected from the group consisting of tungsten, molybdenum, titanium, tantalum, niobium, nickel, cobalt, zirconium, zinc, ruthenium, rhodium, palladium, osmium and iridium.
18. The method for manufacturing a device according to claim 16 , wherein the insulating layer is silicon oxide formed by a chemical vapor deposition using an organic silane.
19. The method for manufacturing a device according to claim 16 , wherein the second substrate is flexible and has an insulating surface.
20. The method for manufacturing a device according to claim 16 , wherein the single-crystal semiconductor layer is a single-crystal layer of one selected from the group consisting of silicon, germanium, silicon germanium, gallium arsenide and indium phosphide.