Mold structures, and method of transfer of fine structures
A mold and a pattern transfer method using the same for a nanoprinting technology. The mold can be released from a substrate accurately and easily. The mold, which is used for forming a fine pattern on a substrate using a press machine, comprises a release mechanism.
1. A pattern transfer method comprising the steps of:
positioning a substrate, while in an original flat state and having a resin film formed thereon, onto a flat, solid buffer material positioned on a curved press machine base;
pressing a stamper having a curved surface at a side on which a concave-convex pattern is formed onto the resin film to transfer said concave-convex pattern onto the resin film while smoothly warping the positioned substrate from said original flat state along the curved surface of the stamper and into conformity with the curvature of the base;
removing the buffer material from the warped substrate; and
lifting the stamper from the warped substrate and patterned resin after removing the buffer material and after release-start points are initially formed as a result of a force exerted by the substrate as the substrate returns from the warped state to said original flat state.
2. The pattern transfer method according to claim 1 , wherein the stamper comprises a deep groove that is deeper than the concave-convex pattern, and wherein the deep groove penetrates the stamper from one side surface thereof to another side surface thereof.
3. The pattern transfer method according to claim 1 , wherein the curved surface of the stamper is convex, and wherein the curve of the curved base is concave.