Compact infrared light detector and method for producing the same, and an infrared light detector system comprising the infrared light detector
An infrared light detector having a sensor chip ( 4 ), which includes a thin-film element ( 5 ) made from a pyroelectrically sensitive material, having an electrical insulator ( 27 ), at least one electronic component ( 17, 18 ) having a thin-film design, which forms part of a readout electronics unit, and a thin-film membrane ( 2 ), on which the sensor chip ( 4 ) and the electronic component ( 17, 18 ) are mounted side by side in an integrated manner such that the electronic component ( 17, 18 ) is electrically conductively coupled to the thin-film element ( 5 ). A signal amplifier ( 22 ), with which, in co-operation with the electronic component ( 17, 18 ), an electrical signal emitted from the sensor chip ( 4 ) can be amplified, can be connected to the electronic component ( 17, 18 ).
1. Infrared light detector comprising:
a sensor chip that has a thin-film element made from a pyroelectrically-sensitive substance with an electrical insulator, at least one electronic component of thin-film construction that forms part of readout electronics, and a thin-film membrane onto which the sensor chip and the electronic component are integrated such that the electronic component is electrically conductively coupled with the thin-film element, wherein the electronic component is configured to connect to a signal amplifier such that an electrical signal emitted from the sensor chip in cooperation with the electronic component is amplified,
wherein the at least one electronic component comprises a capacitor with a dielectric thin-film element, and
wherein the pyroelectric thin-film element and the dielectric thin-film element are of the same thickness and are made of the same substance.
2. Infrared light detector according to claim 1 , wherein the at least one electronic component further comprises an electrical resistor.
3. Infrared light detector according to claim 2 , wherein the electrical resistance is rated at 100 MΩ to 500 GΩ and the capacitor at 0.1 pF to 100 pF.
4. Infrared light detector according to claim 2 , wherein the electrical resistor is of thin-film construction.
5. Infrared light detector system comprising an infrared light detector according to claim 1 and at least one of a junction field effect transistor and an operational amplifier for the signal amplifier, wherein the signal amplifier is connected to the infrared light detector.
6. Method for producing an infrared light detector according to claim 1 , comprising the following steps:
preparing the thin-film membrane;
depositing a pyroelectrically-sensitive substance on the thin-film membrane to form a thin film of the pyroelectrically-sensitive substance; and
removing excess substance of the thin film, so that both the pyroelectric thin-film element as well as the dielectric thin-film element are formed together.
7. Method according to claim 6 further comprising the following steps:
depositing a metal on the thin-film membrane to form a metal layer;
removing the excess substance, so that both the pyroelectric thin-film element with its base electrode together with a base conduction path and the dielectric thin-film element are formed on the base conduction path.
8. Method according to claim 6 , wherein the pyroelectric thin-film element and the dielectric thin-film element are produced from the same substance with the same thickness.
9. Method according to claim 6 , further comprising the following step: depositing a metal on the dielectric thin-film element to form a capacitor and on the thin-film membrane to form an intermediate conduction path.
10. Infrared light detector, comprising:
a sensor chip that has a thin-film element made from a pyroelectrically sensitive substance with an electrical insulator, at least one electronic component of thin-film construction that forms part of readout electronics, and a thin-film membrane onto which the sensor chip and the electronic component are integrated such that the electronic component is electrically conductively coupled with the thin-film element and the electronic component is configured to connect to a signal amplifier such that an electrical signal emitted from the sensor chip in cooperation with the electronic component is amplified,
wherein the at least one electronic component comprises a dielectric thin-film element, and
wherein the insulator and the dielectric thin-film element are equally thick and are made of the same substance.
11. Method for producing an infrared light detector according to claim 10 , comprising the following steps:
preparing the thin-film membrane;
depositing a metal on the thin-film membrane to form a metal layer;
depositing a pyroelectrically-sensitive substance on the metal layer to form a thin film of the pyroelectrically-sensitive substance;
removing excess substance from the thin film and the metal layer, to form a pyroelectric thin-film element, a base electrode for the pyroelectric thin-film element, and a base conduction path, wherein the base electrode of the pyroelectric thin-film element has a lateral projection; and
depositing a metal oxide layer to form an electrical insulator on the projection of the base electrode at the point where a head conduction path is provided, and to form the dielectric thin-film element on the base conduction path, so that the dielectric thin-film element is formed together with the insulator.
12. Method according to claim 11 , wherein the dielectric thin-film element is produced from the substance of the insulator, and wherein the insulator and the dielectric thin-film element are of the same thickness.
13. Infrared light detector system comprising an infrared light detector according to claim 10 and at least one of a junction field effect transistor and an operational amplifier for the signal amplifier, wherein the signal amplifier is connected to the infrared light detector.
14. Infrared light detector according to claim 10 , wherein the at least one electronic component further comprises an electrical resistor.
15. Infrared light detector according to claim 14 , wherein the electrical resistor is of thin-film construction.
16. Infrared light detector according to claim 10 , wherein the dielectric thin-film element forms part of a capacitor.
17. Infrared light detector, comprising:
a sensor chip that has a thin-film element made from a pyroelectrically sensitive substance with an electrical insulator, at least one electronic component of thin-film construction that forms part of readout electronics, and a thin-film membrane onto which the sensor chip and the electronic component are integrated such that the electronic component is electrically conductively coupled with the thin-film element and the electronic component is configured to connect to a signal amplifier such that an electrical signal emitted from the sensor chip in cooperation with the electronic component is amplified,
wherein the at least one electronic component comprises a dielectric thin-film element, and
wherein the dielectric thin-film element is produced from alumina.
18. Infrared light detector according to claim 17 , wherein the substance of the insulator is a metal oxide.
19. Infrared light detector according to claim 17 , wherein the dielectric thin-film element forms part of a capacitor.