IP Library Granted Patent US 8,653,630
Granted Patent B2
US 8,653,630 · App. 13/797,190 · Granted Feb 18, 2014

Layout for multiple-Fin SRAM cell

Inventors: Jhon Jhy Liaw (Hsinchu County, TW); Jeng-Jung Shen (Kaohsiung, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,653,630
App. No.
13/797,190
Granted
Feb 18, 2014
Kind
B2
Abstract

The present disclosure provides a static random access memory (SRAM) cell. The SRAM cell includes a plurality of fin active regions formed on a semiconductor substrate, wherein the plurality of fin active regions include a pair adjacent fin active regions having a first spacing and a fin active region having a second spacing from adjacent fin active regions, the second spacing being greater than the first spacing; a plurality of fin field-effect transistors (FinFETs) formed on the plurality of fin active regions, wherein the plurality of FinFETs are configured to a first and second inverters cross-coupled for data storage and at least one port for data access; a first contact disposed between the first and second the fin active regions, electrically contacting both of the first and second the fin active regions; and a second contact disposed on and electrically contacting the third fin active region.

Claims (31)

1. A device comprising:

a first fin active region, a second fin active region, and a third fin active region extending from a semiconductor substrate, wherein the first and second fin active regions are spaced apart from each other a first distance and the second and third fin active regions are spaced apart from each other a second distance, wherein the second distance is different than the first distance;

a plurality of fin field-effect transistors (FinFETs) formed on at least one of the first, second, and third fin active regions;

a first contact disposed on the first and second fin active regions; and

a second contact disposed on the third fin active region.

2. The device of claim 1 , further comprising a fourth fin active region extending from the semiconductor substrate, the third and fourth fin active regions are spaced way from each other the second distance.

3. The device of claim 1 , wherein the second distance is greater than the first distance.

4. The device of claim 1 , wherein at least one of the first and second fin active regions includes an epitaxy feature formed thereon.

5. The device of claim 4 , wherein the epitaxy feature includes at least one of silicon germanium and silicon carbide.

6. The device of claim 1 , wherein the first contact physically contacts the first and second fin active regions.

7. The device of claim 1 , wherein the plurality of FinFETs include:

a first inverter including a first pull-up transistor (PU- 1 ) and a first and second pull-down transistors (PD- 1 and PD- 2 ); and

a second inverter including a second pull-up transistor (PU- 2 ) and a third and fourth pull-down transistors (PD- 3 and PD- 4 ), the second inverter being cross-coupled with the first inverter for data storage, and

wherein the PD- 1 and PD- 2 are formed on the first and second fin active regions, respectively.

8. A device comprising:

a first fin active region, a second fin active region, and a third fin active region extending from a semiconductor substrate;

a first isolation element extending a first distance from the first fin active region to the second fin active region;

a second isolation element extending a second distance from the second fin active region to the third fin active region, wherein the second distance is different than the first distance;

a plurality of fin field-effect transistors (FinFETs) formed on at least one of the first, second, and third fin active regions;

a first contact disposed on the first and second fin active regions; and

a second contact disposed on the third fin active region.

9. The device of claim 8 , wherein the first and second fin active regions have a first silicon epitaxy feature and a second silicon epitaxy feature, respectively.

10. The device of claim 9 , further comprising a silicide feature formed on the first and second silicon epitaxy features.

11. The device of claim 8 , further comprising a fourth fin active region extending from the semiconductor substrate; and

a third isolation element extending the second distance from the third fin active region to the fourth fin active region.

12. The device of claim 11 , wherein the second contact is not electrically coupled to the fourth fin active region.

13. The device of claim 8 , wherein the plurality of FinFETs includes:

a first pull-up device and a second pull-up device;

a first pull-down device configured with the first pull-up device to form a first inverter;

a second pull-down device configured with the second pull-up device to form a second inverter; and

a first and second pass-gate devices configured with the first and second inverters as a first port.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 30, 2023
From: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
To: ADVANCED MANUFACTURING INNOVATIONS INC.
Reel/Frame 064180/0278 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2013
From: LIAW, JHON JHY; SHEN, JENG-JUNG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 030984/0779 →
Continuity (2)
Division 12827690 · Jun 30, 2010
Related Publication 20130200395A1 · Aug 8, 2013