Semiconductor device and method of manufacturing the semiconductor device
View Patent ↗In a semiconductor device, a first interlayer insulating layer made of an inorganic material and formed on inverse stagger type TFTs, a second interlayer insulating layer made of an organic material and formed on the first interlayer insulating layer, and a pixel electrode formed in contact with the second interlayer insulating layer are disposed on a substrate, and an input terminal portion that is electrically connected to a wiring of another substrate is provided on an end portion of the substrate. The input terminal portion includes a first layer made of the same material as that of the gate electrode and a second layer made of the same material as that of the pixel electrode. With this structure, the number of photomasks used in the photolithography method can be reduced to 5.
1. A liquid crystal display device comprising:
a pixel portion comprising a plurality of pixels over a first substrate, each of the plurality of pixels comprising:
a thin film transistor comprising a gate electrode, a first insulating layer over the gate electrode, a semiconductor layer over the first insulating layer;
a source wiring in electrical contact with the semiconductor layer;
a drain wiring in electrical contact with the semiconductor layer;
a second insulating layer comprising an inorganic material over the source wiring and the drain wiring;
a third insulating layer comprising an organic material over the second insulating layer; and
a pixel electrode over the third insulating layer in electrical contact with one of the source wiring and the drain wiring through a first contact hole of the second insulating layer and a second contact hole of the third insulating layer;
a first conductive layer over the first substrate, the first conductive layer comprising the same material as the gate electrode;
an insulating layer over the first conductive layer;
a second conductive layer over the insulating layer, the second conductive layer comprising the same material as the source wiring and the drain wiring; a third conductive layer over the second conductive layer, the third conductive layer comprising the same material as the pixel electrode, wherein the third conductive layer is in contact with a top surface of the second conductive layer and a top surface and a side surface of the first conductive layer so that the first conductive layer and the second conductive layer are electrically connected to each other;
a second substrate opposing to the first substrate;
a fourth insulating layer comprising an organic material under the second substrate;
a transparent conductive film under the fourth insulating layer; and
a sealant containing a spacer bonding to the first substrate and the second substrate,
wherein the sealant is overlapped with the fourth insulating layer and is not overlapped with the third insulating layer.
2. The liquid crystal display device according to claim 1 , further comprising:
a light shielding film between the second substrate and the fourth insulating layer.
3. The liquid crystal display device according to claim 1 , wherein the organic material of the third insulating layer is the same as that of the fourth insulating layer.
4. The liquid crystal display device according to claim 1 , wherein the organic material of the third insulating layer is a material selected from the group consisting of polyimide, acrylic, polyimide, polyimidamide and benzocyclobutene.
5. The liquid crystal display device according to claim 1 , wherein the pixel electrode is a transparent conductive film.
6. The liquid crystal display device according to claim 1 , wherein the third insulating layer is a flat surface.
7. The liquid crystal display device according to claim 1 , wherein the inorganic material of the second insulating layer is a silicon nitride film.
8. An electronic device having the liquid crystal display device according to claim 1 , the electronic device is one selected from the group consisting of a personal computer, a digital camera, a video camera, a mobile computer, a portable telephone, an electronic document, and a television.
9. The liquid crystal display device according to claim 1 , further comprising a source region and a drain region over the semiconductor layer.
10. The liquid crystal display device according to claim 1 , further comprising a color filter between the second substrate and the fourth insulating layer.
11. An electronic device having the liquid crystal display device according to claim 1 , the electronic device further comprises a light source adjacent to the liquid crystal display device.
12. An electronic device having the liquid crystal display device according to claim 1 , the electronic device further comprises a flexible printed circuit attached to the liquid crystal display device.
13. The liquid crystal display device according to claim 1 , wherein the semiconductor layer is a silicon film.
14. The liquid crystal display device according to claim 1 , wherein the semiconductor layer is an amorphous silicon film.
15. The liquid crystal display device according to claim 1 , wherein the first conductive layer, the second conductive layer and the third conductive layer are included in an input terminal portion.
16. A display device comprising:
a pixel portion comprising a plurality of pixels over a first substrate, each of the plurality of pixels comprising:
a thin film transistor comprising a gate electrode, a first insulating layer over the gate electrode, a semiconductor layer over the first insulating layer;
a source wiring in electrical contact with the semiconductor layer;
a drain wiring in electrical contact with the semiconductor layer;
a second insulating layer comprising an inorganic material over the source wiring and the drain wiring;
a third insulating layer comprising an organic material over the second insulating layer; and
a pixel electrode over the third insulating layer in electrical contact with one of the source wiring and the drain wiring through a first contact hole of the second insulating layer and a second contact hole of the third insulating layer;
a first conductive layer over the first substrate, the first conductive layer comprising the same material as the gate electrode;
an insulating layer over the first conductive layer;
a second conductive layer over the insulating layer, the second conductive layer comprising the same material as the source wiring and the drain wiring;
a third conductive layer over the second conductive layer, the third conductive layer comprising the same material as the pixel electrode, wherein the third conductive layer is in contact with a top surface of the second conductive layer and a top surface and a side surface of the first conductive layer so that the first conductive layer and the second conductive layer are electrically connected to each other.
17. The display device according to claim 16 , wherein the semiconductor layer is an amorphous silicon film.
18. The display device according to claim 16 , wherein the display device is a liquid crystal device.
19. The display device according to claim 16 , wherein the organic material of the third insulating layer is a material selected from the group consisting of polyimide, acrylic, polyamide, polyimidamide and benzocyclobutene.
20. The display device according to claim 16 , wherein the pixel electrode is a transparent conductive film comprising indium oxide and zinc oxide.
21. The display device according to claim 16 , wherein the third insulating layer is a flat surface.
22. The display device according to claim 16 , wherein the inorganic material of the second insulating layer is a silicon nitride film.
23. An electronic device having the display device according to claim 16 , the electronic device is one selected from the group consisting of a personal computer, a digital camera, a video camera, a mobile computer, a portable telephone, an electronic document, and a television.
24. The display device according to claim 16 , further comprising a source region and a drain region over the semiconductor layer.
25. The display device according to claim 16 , further comprising a color filter between the second substrate and the fourth insulating layer.
26. An electronic device having the display device according to claim 16 , the electronic device further comprises a flexible printed circuit attached to the liquid crystal display device.
27. The display device according to claim 16 , wherein the semiconductor layer is a silicon film.
28. The display device according to claim 16 , wherein the first conductive layer, the second conductive layer and the third conductive layer are included in an input terminal portion.