Semiconductor device wherein each of a first oxide semiconductor layer and a second oxide semiconductor layer includes a portion that is in an oxygen-excess state which is in contact with a second insulatng layer
An object is to improve reliability of a semiconductor device. A semiconductor device including a driver circuit portion and a display portion (also referred to as a pixel portion) over the same substrate is provided. The driver circuit portion and the display portion include thin film transistors in which a semiconductor layer includes an oxide semiconductor; a first wiring; and a second wiring. The thin film transistors each include a source electrode layer and a drain electrode layer. In the thin film transistor in the driver circuit portion, the semiconductor layer is sandwiched between a gate electrode layer and a conductive layer. The first wiring and the second wiring are electrically connected to each other in an opening provided in a gate insulating film through an oxide conductive layer.
1. A semiconductor device comprising:
a substrate;
a driver circuit portion including a first transistor over the substrate; and
a pixel portion including a second transistor and a pixel electrode layer over the substrate,
wherein the first transistor comprises
a first electrode layer;
a first insulating layer over the first electrode layer;
a first oxide semiconductor layer over the first insulating layer;
a second electrode layer and a third electrode layer over the first oxide semiconductor layer;
a second insulating layer over the second electrode layer, the third electrode layer, and the first oxide semiconductor layer; and
a conductive layer over the second insulating layer, wherein the conductive layer and the first electrode layer are overlapped with each other with the first insulating layer, the first oxide semiconductor layer, and the second insulating layer interposed therebetween,
wherein the second transistor comprises:
a fourth electrode layer;
the first insulating layer over the fourth electrode layer;
a second oxide semiconductor layer over the first insulating layer;
a fifth electrode layer and a sixth electrode layer over the second oxide semiconductor layer; and
the second insulating layer over the fifth electrode layer, the sixth electrode layer, and the second oxide semiconductor layer,
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer includes a portion which is in contact with the second insulating layer, the portion being in an oxygen-excess state, and
wherein the pixel electrode layer is electrically connected to the second transistor.
2. The semiconductor device according to claim 1 ,
wherein the first transistor further comprises a first oxide conductive layer and the second transistor further comprises a second oxide conductive layer,
wherein the first oxide conductive layer is interposed between the first oxide semiconductor layer and the second electrode layer, and
wherein the second oxide conductive layer is interposed between the second oxide semiconductor layer and the fifth electrode layer.
3. The semiconductor device according to claim 2 ,
wherein each of the first oxide conductive layer and the second oxide conductive layer includes any one of zinc oxide, aluminum zinc oxide, aluminum zinc oxynitride, and gallium zinc oxide.
4. The semiconductor device according to claim 1 ,
wherein the first insulating layer is formed using a single layer or stacked layers of a silicon oxide layer, a silicon oxynitride layer, or an aluminum oxide layer.
5. The semiconductor device according to claim 1 ,
wherein the pixel electrode layer and the conductive layer are formed using the same material which is any one of indium oxide, an indium oxide-tin oxide alloy, an indium oxide-zinc oxide alloy, and zinc oxide.
6. The semiconductor device according to claim 1 ,
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer comprises a channel formation region, a source region, and a drain region, and
wherein a carrier concentration of the channel formation region is lower than that of the source region and the drain region.
7. A semiconductor device comprising:
a substrate;
a driver circuit portion including a first transistor over the substrate;
a pixel portion including a second transistor and a pixel electrode layer over the substrate; and
a first wiring and a second wiring,
wherein the first transistor comprises:
a first electrode layer;
a first insulating layer over the first electrode layer;
a first oxide semiconductor layer over the first insulating layer;
a second electrode layer and a third electrode layer over the first oxide semiconductor layer;
a second insulating layer over the second electrode layer, the third electrode layer, and the first oxide semiconductor layer; and
a conductive layer over the second insulating layer, wherein the conductive layer and the first electrode layer are overlapped with each other with the first insulating layer, the first oxide semiconductor layer, and the second insulating layer interposed therebetween,
wherein the second transistor comprises:
a fourth electrode layer;
the first insulating layer over the fourth electrode layer;
a second oxide semiconductor layer over the first insulating layer;
a fifth electrode layer and a sixth electrode layer over the second oxide semiconductor layer; and
the second insulating layer over the fifth electrode layer, the sixth electrode layer, and the second oxide semiconductor layer,
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer includes a portion which is in contact with the second insulating layer, the portion being in an oxygen-excess state,
wherein the first wiring is formed using the same material as that of the first electrode layer and the fourth electrode layer,
wherein the second wiring comprises the same layered structure as that of the second electrode layer, the third electrode layer, the fifth electrode layer, and the sixth electrode layer, and
wherein the pixel electrode layer is electrically connected to the second transistor.
8. The semiconductor device according to claim 7 ,
wherein the first transistor further comprises a first oxide conductive layer and the second transistor further comprises a second oxide conductive layer,
wherein the first oxide conductive layer is interposed between the first oxide semiconductor layer and the second electrode layer, and
wherein the second oxide conductive layer is interposed between the second oxide semiconductor layer and the fifth electrode layer.
9. The semiconductor device according to claim 8 ,
wherein each of the first oxide conductive layer and the second oxide conductive layer includes any one of zinc oxide, aluminum zinc oxide, aluminum zinc oxynitride, and gallium zinc oxide.
10. The semiconductor device according to claim 7 ,
wherein the first insulating layer is formed using a single layer or stacked layers of a silicon oxide layer, a silicon oxynitride layer, or an aluminum oxide layer.
11. The semiconductor device according to claim 7 ,
wherein the pixel electrode layer and the conductive layer are formed using the same material which is any one of indium oxide, an indium oxide-tin oxide alloy, an indium oxide-zinc oxide alloy, and zinc oxide.
12. The semiconductor device according to claim 7 ,
wherein the first oxide semiconductor layer is formed using the same material as that of the second oxide semiconductor layer.
13. The semiconductor device according to claim 7 ,
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer comprises a channel formation region, a source region, and a drain region, and
wherein a carrier concentration of the channel formation region is lower than that of the source region and the drain region.
14. The semiconductor device according to claim 7 ,
wherein the first wiring is electrically connected to the second wiring through an opening provided in the first insulating layer over the first wiring.