Semiconductor device and method of manufacturing the same

1. A semiconductor device comprising:

a first conductivity-type drift layer;

a second conductivity-type base layer on a front side of the drift layer;

a plurality of trench gate structures, each trench gate structure including a trench reaching the drift layer by penetrating the base layer, a gate insulation layer on a wall surface of the trench, and a gate electrode on the gate insulation layer, the trench gate structure having a length direction parallel to a planar direction of the drift layer, a width direction parallel to the planar direction of the drift layer and perpendicular to the length direction, and a depth direction perpendicular to the planar direction of the drift layer;

a first conductivity-type emitter layer located in a surface portion of the base layer and located adjacent to the trench gate structure;

a second conductivity-type collector layer located across the drift layer from the emitter layer, and

a second conductivity-type contact layer located in the surface portion of the base layer and located between adjacent trench gate structures across the emitter layer, wherein

the trench gate structure has a bottom portion and an opening portion, the bottom portion defining a bottom of the trench gate structure, the opening portion located on an opposite side of the trench gate structure from the bottom portion in the depth direction,

the bottom portion of the trench gate structure is located in the drift layer and expands in the width direction so that a distance between the bottom portions of adjacent trench gate structures is less than a distance between the opening portions of adjacent trench gate structures in the width direction,

a thickness of the gate insulation layer on the wall surface of the trench of the bottom portion is greater than a thickness of the gate insulation layer on the wall surface of the trench of the opening portion,

the contact layer is located facing the drift layer between the bottom portions of adjacent trench gate structures,

a depth of the contact layer is greater than a depth of the emitter layer from a surface of the base layer in the depth direction, and

a width of the contact layer is greater than the distance between the bottom portions of adjacent trench gate structures in the width direction.

2. The semiconductor device according to claim 1 , wherein

the thickness of the gate insulation layer on a side wall of the trench of the bottom portion is greater than the thickness of the gate insulation layer on a side wall of the trench of the opening portion.

3. The semiconductor device according to claim 1 , wherein

the trench includes a first trench and a second trench,

the first trench is located in the base layer,

the second trench communicates with the first trench and reaches the drift layer,

a distance between opposing points on a side wall of the second trench is greater than a distance between opposing points on a side wall of the first trench in the width direction,

the thickness of the gate insulation layer on the wall surface of the second trench is greater than the thickness of the gate insulation layer on the wall surface of the first trench, and

the bottom portion of the trench gate structure includes the second trench, the gate insulation layer on the wall surface of the second trench, and the gate electrode on the gate insulation layer on the wall surface of the second trench.

4. The semiconductor device according to claim 1 , wherein

the collector layer is located on a back side of the drift layer.

5. The semiconductor device according to claim 1 , wherein

the collector layer is located in a surface portion of the front side of the drift layer.

6. A method of manufacturing a semiconductor device, the method comprising:

preparing a substrate including a second conductivity-type second collector layer, a first conductivity-type drift layer on the collector layer, and a second conductivity-type base layer on the drift layer;

forming a plurality of first trenches in the base layer by an anisotropic etching process, each first trench having a length in a first direction;

forming a first gate insulation layer in each first trench;

forming an oxygen impermeable protection layer on the first gate insulation layer in each first trench;

forming a plurality of second trenches communicating with the plurality of first trenches by removing the protection layer on a bottom of each first trench by an anisotropic etching process in such a manner that each second trench has a bottom in the drift layer and that each second trench expands in a second direction parallel to a planar direction of the substrate, the second direction being perpendicular to the first direction;

forming a second gate insulation layer thicker than the first gate insulation layer in each second trench by a thermal oxidation process;

removing the protection layer on an inner side wall of each first trench;

forming a gate electrode on the first gate insulation layer and the second gate insulation layer;

forming a first conductivity-type emitter layer in a surface portion of the base layer between adjacent first trenches in such a manner that the emitter layer is located adjacent to each first trench; and

forming a second conductivity-type contact layer in the surface portion of the base layer between adjacent first trenches across the emitter layer, wherein

the contact layer is located facing the drift layer between adjacent second trenches in a third direction perpendicular to the planar direction of the substrate,

a depth of the contact layer is greater than a depth of the emitter layer from a surface of the base layer in the third direction, and

a width of the contact layer is greater than a distance between adjacent second trenches in the second direction.

7. The method according to claim 6 , wherein

the forming of the plurality of second trenches includes performing an isotropic etching process to expand each second trench in the second direction in such a manner that a width of each second trench is greater than a width of each first trench in the second direction.

8. A method of manufacturing a semiconductor device, the method comprising:

preparing a substrate including a second conductivity-type second collector layer, a first conductivity-type drift layer on the collector layer, and a second conductivity-type base layer on the drift layer;

forming a plurality of first trenches in the base layer by an anisotropic etching process, each first trench having a length in a first direction;

forming a first insulation layer in each first trench;

forming a plurality of second trenches communicating with the plurality of first trenches by removing the first insulation layer on a bottom of each first trench by an anisotropic etching process in such a manner that each second trench has a bottom in the drift layer and that each second trench expands in a second direction parallel to a planar direction of the substrate, the second direction being perpendicular to the first direction;

forming a second insulation layer in each second trench by a thermal oxidation process;

filling each first trench and each second trench with a first conductive material to form a gate electrode on the first insulation layer and the second insulation layer;

removing the first conductive material in each first trench;

removing the first insulation layer on an inner side wall of each first trench;

forming a third insulation layer on the inner side wall of each first trench and on the first conductive material in each second trench in such a manner that the third insulation layer is thinner than the second insulation layer;

filling each first trench with a second conductive material to form the gate electrode;

forming a first conductivity-type emitter layer in a surface portion of the base layer between adjacent first trenches in such a manner that the emitter layer is located adjacent to each first trench; and

forming a second conductivity-type contact layer in the surface portion of the base layer between adjacent first trenches across the emitter layer, wherein

the contact layer is located facing the drift layer between adjacent second trenches in a third direction perpendicular to the planar direction of the substrate,

a depth of the contact layer is greater than a depth of the emitter layer from a surface of the base layer in the third direction, and

a width of the contact layer is greater than a distance between adjacent second trenches in the second direction.

9. The method according to claim 8 , wherein

the forming of the plurality of second trenches includes performing an isotropic etching process to expand each second trench in the second direction in such a manner that a width of each second trench is greater than a width of each first trench in the second direction.

10. A method of manufacturing a semiconductor device, the method comprising:

preparing a substrate including a first conductivity-type drift layer and a second conductivity-type base layer on a front side of the drift layer;

forming a plurality of first trenches in the base layer by an anisotropic etching process, each first trench having a length in a first direction;

forming a first gate insulation layer in each first trench;

forming an oxygen impermeable protection layer on the first gate insulation layer in each first trench;

forming a plurality of second trenches communicating with the plurality of first trenches by removing the protection layer on a bottom of each first trench by an anisotropic etching process in such a manner that each second trench has a bottom in the drift layer and that each second trench expands in a second direction parallel to a planar direction of the substrate, the second direction being perpendicular to the first direction;

forming a second gate insulation layer thicker than the first gate insulation layer in each second trench by a thermal oxidation process;

forming a second conductivity-type collector layer by ion implantation of impurities into the substrate and by annealing the substrate;

forming a first conductivity-type emitter layer in a surface portion of the base layer between adjacent first trenches in such a manner that the emitter layer is located adjacent to each first trench; and

forming a second conductivity-type contact layer in the surface portion of the base layer between adjacent first trenches across the emitter layer, wherein

the contact layer is located facing the drift layer between adjacent second trenches in a third direction perpendicular to the planar direction of the substrate,

a depth of the contact layer is greater than a depth of the emitter layer from a surface of the base layer in the third direction, and

a width of the contact layer is greater than a distance between adjacent second trenches in the second direction.

11. The method according to claim 10 , wherein

the ion implantation is performed from a back side of the drift layer.

12. The method according to claim 10 , wherein

the forming of the plurality of second trenches includes performing an isotropic etching process to expand each second trench in the second direction in such a manner that a width of each second trench is greater than a width of each first trench in the second direction.

13. A method of manufacturing a semiconductor device, the method comprising:

preparing a substrate including a first conductivity-type drift layer and a second conductivity-type base layer on a front side of the drift layer;

forming a plurality of first trenches in the base layer by an anisotropic etching process, each first trench having a length in a first direction;

forming a first insulation layer in each first trench;

forming a plurality of second trenches communicating with the plurality of first trenches by removing the first insulation layer on a bottom of each first trench by an anisotropic etching process in such a manner that each second trench has a bottom in the drift layer and that each second trench expands in a second direction parallel to a planar direction of the substrate, the second direction being perpendicular to the first direction;

forming a second insulation layer in each second trench by a thermal oxidation process;

filling each first trench and each second trench with a first conductive material to form a gate electrode on the first insulation layer and the second insulation layer;

removing the first conductive material in each first trench;

removing the first insulation layer on an inner side wall of each first trench;

forming a third insulation layer on the inner side wall of each first trench and on the first conductive material in each second trench in such a manner that the third insulation layer is thinner than the second insulation layer

filling each first trench with a second conductive material to form the gate electrode;

forming a second conductivity-type collector layer by ion implantation of impurities into the substrate and by annealing the substrate;

forming a first conductivity-type emitter layer in a surface portion of the base layer between adjacent first trenches in such a manner that the emitter layer is located adjacent to each first trench; and

forming a second conductivity-type contact layer in the surface portion of the base layer between adjacent first trenches across the emitter layer, wherein

the contact layer is located facing the drift layer between adjacent second trenches in a third direction perpendicular to the planar direction of the substrate,

a depth of the contact layer is greater than a depth of the emitter layer from a surface of the base layer in the third direction, and

a width of the contact layer is greater than a distance between adjacent second trenches in the second direction.

14. The method according to claim 13 , wherein

the ion implantation is performed from a back side of the drift layer.

15. The method according to claim 13 , wherein

the forming of the plurality of second trenches includes performing an isotropic etching process to expand each second trench in the second direction in such a manner that a width of each second trench is greater than a width of each first trench in the second direction.