MEMS microphone
View Patent ↗A MEMS microphone includes a cover, a housing engaging with the cover for forming a cavity, at least one transducer accommodated in the cavity, and a conductive case covering the cover and the sidewall of the housing. The housing includes a cover and a sidewall extending from the base. The conductive case defines a first part covering the cover, a second part extending from the first part for covering the sidewall and a third part perpendicularly extending from the second part for covering a periphery part of the base, the third part forming an opening.
1. A MEMS microphone, comprising:
a cover;
a housing engaging with the cover for forming a cavity, the housing comprising a base and a sidewall extending perpendicularly from the base;
at least one MEMS transducer accommodated in the cavity, the transducer having a back volume;
and a conductive case covering the cover and the sidewall of the housing for protecting the transducer against interference signals;
wherein the conductive case defines a first part covering the cover, a second part extending from the first part for covering the sidewall and a third part perpendicularly extending from the second part for covering a periphery part of the base, the third part forming an opening;
and wherein the cover is a printed circuit board, and the housing includes circuits embedded therein for electrically connecting with the cover;
and wherein the cover defines a recess, and the sidewall of the housing defines a protrusion for engaging with the recess.
2. The MEMS microphone as described in claim 1 , wherein the cover defines an acoustic hole for receiving acoustic signals.
3. The MEMS microphone as described in claim 2 , wherein the transducer is mounted on the cover and overlaps at least a portion of the acoustic hole.
4. The MEMS microphone as described in claim 2 , wherein the back volume of the transducer communicates with the acoustic hole.
5. The MEMS microphone as described in claim 2 , wherein the conductive case defines an acoustic aperture communicating with the acoustic hole.
6. The MEMS microphone as described in claim 1 , wherein the cover defines a first group of terminals for electrically connecting with the circuits in the sidewall of the housing and a second group of terminals for electrically connecting with the transducer.