IP Library Granted Patent US 8,680,632
Granted Patent B2
US 8,680,632 · App. 13/310,154 · Granted Mar 25, 2014

Magnetoresistive element and magnetic memory

Inventors: Tadaomi Daibou (Yokohama, JP); Junichi Ito (Yokohama, JP); Tadashi Kai (Tokyo, JP); Minoru Amano (Sagamihara, JP); Hiroaki Yoda (Sagamihara, JP); Terunobu Miyazaki (Sendai, JP); Shigemi Mizukami (Sendai, JP); Koji Ando (Tsukuba, JP); Kay Yakushiji (Tsukuba, JP); Shinji Yuasa (Tsukuba, JP); Hitoshi Kubota (Tsukuba, JP); Akio Fukushima (Tsukuba, JP); Taro Nagahama (Tsukuba, JP); Takahide Kubota (Sendai, JP)
Assignees: Kabushiki Kaisha Toshiba; WPI-AIMR, Tohoku University
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Quick Facts
Patent No.
US 8,680,632
App. No.
13/310,154
Granted
Mar 25, 2014
Kind
B2
Abstract

A magnetoresistive element according to an embodiment includes: a base layer; a first magnetic layer formed on the base layer, and including a first magnetic film having an axis of easy magnetization in a direction perpendicular to a film plane, the first magnetic film including Mn x Ga 100-x (45≦x<64 atomic %); a first nonmagnetic layer formed on the first magnetic layer; and a second magnetic layer formed on the first nonmagnetic layer, and including a second magnetic film having an axis of easy magnetization in a direction perpendicular to a film plane, the second magnetic film including Mn y Ga 100-y (45≦y<64 atomic %). The first and second magnetic layers include different Mn composition rates from each other, a magnetization direction of the first magnetic layer is changeable by a current flowing between the first magnetic layer and the second magnetic layer via the first nonmagnetic layer.

Claims (54)

1. A magnetoresistive element comprising:

a base layer;

a first magnetic layer formed on the base layer, and including a first magnetic film having an axis of easy magnetization in a direction perpendicular to a film plane, the first magnetic film including Mn x Ga 100 - x (45 x <64 atomic %);

a first nonmagnetic layer formed on the first magnetic layer; and

a second magnetic layer formed on the first nonmagnetic layer, and including a second magnetic film having an axis of easy magnetization in a direction perpendicular to a film plane, the second magnetic film including Mn y Ga 100-y (45 y <64 atomic %),

the first and second magnetic layers comprising different Mn composition rates from each other, the first magnetic layer having a smaller Mn concentration than the second magnetic layer, a magnetization direction of the first magnetic layer being changeable and a magnetization direction of the second magnetic layer being unchangeable.

2. The magnetoresistive element according to claim 1 , wherein the first nonmagnetic layer is an oxide that contains one element selected from the group consisting of Mg, Ca, Al, Sr, and Ti.

3. The magnetoresistive element according to claim 1 , wherein an interfacial layer containing Al and Mn is formed between the first magnetic layer and the first nonmagnetic layer, and/or between the second magnetic layer and the first nonmagnetic layer.

4. The magnetoresistive element according to claim 1 , wherein the base layer includes a nitride layer that has a (001) oriented NaCl structure, the nitride layer containing at least one element selected from the group consisting of Ti, Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce.

5. The magnetoresistive element according to claim 1 , wherein the base layer includes a (001) oriented perovskite oxide that is made of ABO 3 , the A-site containing at least one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba, the B-site containing at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb.

6. The magnetoresistive element according to claim 1 , wherein the base layer includes an oxide layer that has a (001) oriented NaCl structure, the oxide layer containing at least one element selected from the group consisting of Mg, Al, and Ce.

7. The magnetoresistive element according to claim 1 , wherein the base layer comprises one of a tetragonal structure and a cubic structure, is (001) oriented, and contains at least one element selected from the group consisting of Al, Cr, Fe, Co, Rh, Pd, Ag, Ir, Pt, and Au.

8. The magnetoresistive element according to claim 1 , wherein

the base layer includes a first layer and a second layer formed on the first layer,

the first layer includes at least one of:

a nitride layer that has a (001) oriented NaCl structure, and contains at least one element selected from the group consisting of Ti, Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce;

a (001) oriented perovskite oxide layer that is made of ABO 3 , the A-site containing at least one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba, the B-site containing at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb; and

an oxide layer that has a (001) oriented NaCl structure, and contains at least one element selected from the group consisting of Mg, Al, and Ce, and

the second layer has one of a tetragonal structure and a cubic structure, is (001) oriented, and contains at least one element selected from the group consisting of Al, Cr, Fe, Co, Rh, Pd, Ag, Ir, Pt, and Au.

9. The magnetoresistive element according to claim 1 , wherein

the second magnetic layer has a fixed magnetization direction,

the magnetoresistive element further comprises: a third magnetic layer formed on the opposite side of the second magnetic layer from the first nonmagnetic layer, having an axis of easy magnetization in a direction perpendicular to a film plane, and having a magnetization direction antiparallel to the magnetization direction of the second magnetic layer; and a second nonmagnetic layer formed between the second ferromagnetic layer and the third ferromagnetic layer,

wherein M S2 represents a saturation magnetization of the second magnetic layer, t 2 represents a film thickness of the second magnetic layer, M s3 represents a saturation magnetization of the third magnetic layer, and t 3 represents a film thickness of the third magnetic layer, and the following relationship is satisfied

M S2 ×t 2 <M S3 ×t 3 .

10. A magnetic memory comprising:

the magnetoresistive element according to claim 1 ;

a first interconnect that is electrically connected to the first magnetic layer of the magnetoresistive element; and

a second interconnect that is electrically connected to the second magnetic layer of the magnetoresistive element.

11. A magnetoresistive element comprising:

a base layer; and

a stacked structure formed on the base layer, the stacked structure including: a first magnetic layer including a first magnetic film having an axis of easy magnetization in a direction perpendicular to a film plane, the first magnetic film including Mn x Ga 100 - x (45 x <64 atomic %); a second magnetic layer including a second magnetic film having an axis of easy magnetization in a direction perpendicular to a film plane; a first nonmagnetic layer formed between the first magnetic layer and the second magnetic layer, and containing at least one element selected from the group consisting of Mg, Ca, Ba, Al, Ag, Cu, Be, Sr, Zn, and Ti; and an interfacial layer formed between the first magnetic layer and the first nonmagnetic layer, the interfacial layer containing Al and Mn,

a magnetization direction of the first magnetic layer being changeable.

12. The magnetoresistive element according to claim 11 , further comprising

an interfacial layer formed between the second magnetic layer and the first nonmagnetic layer, and containing at least one element selected from the group consisting of Cr, Co, Fe, Ni, B, C, P, Ta, Ti, Mo, Al, Si, W, Nb, Mn, and Ge.

13. The magnetoresistive element according to claim 11 , wherein the base layer includes a nitride layer that has a (001) oriented NaCl structure, the nitride layer containing at least one element selected from the group consisting of Ti, Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce.

14. The magnetoresistive element according to claim 11 , wherein the base layer includes a (001) oriented perovskite oxide that is made of ABO 3 , the A-site containing at least one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba, the B-site containing at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb.

15. The magnetoresistive element according to claim 11 , wherein the base layer includes an oxide layer that has a (001) oriented NaCl structure, the oxide layer containing at least one element selected from the group consisting of Mg, Al, and Ce.

16. The magnetoresistive element according to claim 11 , wherein the base layer comprises one of a tetragonal structure and a cubic structure, is (001) oriented, and contains at least one element selected from the group consisting of Al, Cr, Fe, Co, Rh, Pd, Ag, Ir, Pt, and Au.

17. The magnetoresistive element according to claim 11 , wherein

the base layer includes a first layer and a second layer formed on the first layer,

the first layer includes at least one of:

a nitride layer that has a (001) oriented NaCl structure, and contains at least one element selected from the group consisting of Ti, Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce;

a (001) oriented perovskite oxide layer that is made of ABO 3 , the A-site containing at least one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba, the B-site containing at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb; and

an oxide layer that has a (001) oriented NaCl structure, and contains at least one element selected from the group consisting of Mg, Al, and Ce, and

the second layer has one of a tetragonal structure and a cubic structure, is (001) oriented, and contains at least one element selected from the group consisting of Al, Cr, Fe, Co, Rh, Pd, Ag, Ir, Pt, and Au.

18. The magnetoresistive element according to claim 11 , wherein

the second magnetic layer has a fixed magnetization direction,

the magnetoresistive element further comprises: a third magnetic layer formed on the opposite side of the second magnetic layer from the first nonmagnetic layer, having an axis of easy magnetization in a direction perpendicular to a film plane, and having a magnetization direction antiparallel to the magnetization direction of the second magnetic layer; and a second nonmagnetic layer formed between the second ferromagnetic layer and the third ferromagnetic layer,

wherein M S2 represents a saturation magnetization of the second magnetic layer, t 2 represents a film thickness of the second magnetic layer, M s3 represents a saturation magnetization of the third magnetic layer, and t 3 represents a film thickness of the third magnetic layer, and the following relationship is satisfied

M S2 ×t 2 <M S3 ×t 3 .

19. A magnetic memory comprising:

the magnetoresistive element according to claim 11 ;

a first interconnect that is electrically connected to the first magnetic layer of the magnetoresistive element; and

a second interconnect that is electrically connected to the second magnetic layer of the magnetoresistive element.

Assignments (4)
MERGER AND CHANGE OF NAME Recorded Feb 10, 2022
From: TOSHIBA MEMORY CORPORATION; K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 059003/0256 →
CHANGE OF NAME Recorded Feb 10, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 059003/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 29, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043438/0591 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 26, 2012
From: DAIBOU, TADAOMI; ITO, JUNICHI; KAI, TADASHI; AMANO, MINORU; YODA, HIROAKI; MIYAZAKI, TERUNOBU; MIZUKAMI, SHIGEMI; ANDO, KOJI; YAKUSHIJI, KAY; YUASA, SHINJI; KUBOTA, HITOSHI; FUKUSHIMA, AKIO; NAGAHAMA, TARO; KUBOTA, TAKAHIDE
To: KABUSHIKI KAISHA TOSHIBA; WPI-AIMR, TOHOKU UNIVERSITY
Reel/Frame 027926/0398 →
Priority Claims (1)
JP 2011-068868 · Mar 25, 2011 · national
Continuity (1)
Related Publication 20120241881A1 · Sep 27, 2012