Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm 3 .
1. An abrasive particulate material comprising:
alumina particles comprising transition alumina and at least 5.0 wt % and not greater than about 40 wt % of an amorphous phase, the alumina particles having a density not greater than about 3.00 g/cm 3 , a primary particle size not greater than about 85 nm, and a specific surface area of not less than about 100 m 2 /g.
2. The abrasive particulate material of claim 1 , wherein the transition alumina comprises at least one of gamma phase alumina and delta phase alumina.
3. The abrasive particulate material of claim 2 , wherein the transition alumina comprises delta phase alumina.
4. The abrasive particulate material of claim 2 , wherein the alumina particles comprise not less than about 20 wt % gamma phase alumina.
5. The abrasive particulate material of claim 1 , wherein the transition alumina comprises theta phase alumina.
6. The abrasive particulate material of claim 5 , wherein the alumina particles comprise not less than about 5 wt % theta phase alumina.
7. The abrasive particulate material of claim 1 , wherein the alumina particles have a density not greater than about 2.95 g/cm 3 .
8. The abrasive particulate material of claim 1 , wherein the specific surface area is not less than about 125 m 2 /g.
9. The abrasive particulate material of claim 8 , wherein the specific surface area is not less than about 150 m 2 /g.
10. The abrasive particulate material of claim 1 , wherein the alumina particles comprise an elongated morphology.
11. The abrasive particulate material of claim 10 , wherein the alumina particles are platelet-shaped, having a primary aspect ratio not less than about 3:1 and a secondary aspect ratio not less than about 3:1.
12. The abrasive particulate material of claim 10 , wherein the alumina particles are needle-shaped, having a primary aspect ratio not less than about 3:1 and a secondary aspect ratio not greater than about 3:1.
13. The abrasive particulate material of claim 1 , wherein the average primary particle size is not greater than about 40 nm.
14. The abrasive particulate material of claim 1 , wherein the alumina particles have an average secondary particle size not greater than about 200 nm.
15. The abrasive particulate material of claim 14 , wherein the average secondary particle size is not greater than about 150 nm.
16. The abrasive particulate material of claim 1 , wherein the abrasive particulate material comprises a slurry.
17. The abrasive particulate material of claim 16 , wherein the slurry has a colloidal stability as determined by a sedimentation height of about 0.0 mm after 3 days.
18. An abrasive particulate material comprising:
alumina particles comprising transition alumina and at least 5.0 wt % and not greater than about 40 wt % of an amorphous phase, wherein the transition alumina includes theta phase and at least one of gamma phase and delta phase, wherein the alumina particles have a primary particle size not greater than about 85 nm, a density not greater than about 3.00 g/cm 3 , and a specific surface area not less than about 100 m 2 /g.
19. The abrasive particulate material of claim 18 , wherein the alumina particles comprise not less than about 20% gamma phase alumina.
20. The abrasive particulate material of claim 18 , wherein the transition alumina comprises delta phase alumina.
21. The abrasive particulate material of claim 18 , wherein a majority of the transition alumina comprises at least one of or a combination of gamma phase and delta phase, the alumina particles comprising 30 to 70 wt % of at least one of or a combination of gamma phase and delta phase, and 5 to 45 wt % theta phase.
22. The abrasive particulate material of claim 18 , wherein the alumina particles comprise not less than about 10 wt % and not greater than about 40 wt % amorphous phase.