Method of forming contact and semiconductor device manufactured by using the method

1. A method of forming a contact, the method comprising:

forming an inter-layer dielectric layer to cover a gate formed on a semiconductor substrate;

forming a first hole which passes through the inter-layer dielectric layer to expose the gate, a second hole which exposes an active region of the semiconductor substrate, and a third hole which exposes the semiconductor substrate at a preset depth;

forming a shielding layer on the semiconductor substrate including the bottoms and sidewalls of the first hole, the second hole, and the third hole;

removing the shielding layer at the bottoms of the first hole and the second hole to expose the gate and the active region; and

filling the first hole, the second hole, and the third hole with a conductive material.

2. The method of claim 1 , wherein said forming the first hole to the third hole is performed such that the third hole is formed through a separate step from the first hole and the second hole.

3. The method of claim 1 ,

wherein said exposing the gate and the active region includes

forming a mask pattern on the semiconductor substrate, on which the shielding layer is formed, to expose the first hole and the second hole; and

etching the shielding layer at the bottoms of the first and second holes at a preset length using the mask pattern.