Etchant-free methods of producing a gap between two layers, and devices produced thereby
View Patent ↗Etchant-free methods of producing a gap between two materials are provided. Aspects of the methods include providing a structure comprising a first material and a second material, and subjecting the structure to conditions sufficient to cause a decrease in the volume of at least a portion of at least one of the first material and the second material to produce a gap between the first material and the second material. Also provided are devices produced by the methods (e.g., MEMS and NEMS devices), structures used in the methods and methods of making such structures.
1. A method of producing a gap between a first material and a second material of a structure, the method comprising:
subjecting a structure comprising a first material and a second material to conditions sufficient to cause a decrease in the volume of at least a portion of at least one of the first material and the second material to produce a gap between the first material and the second material.
2. The method according to claim 1 , wherein the subjecting comprises subjecting the structure to electromagnetic radiation.
3. The method according to claim 1 , wherein the structure further comprises an intermediate material positioned between the first material and the second material, and wherein the subjecting comprises subjecting the structure to conditions sufficient for at least a portion of the intermediate material and the first material to react to produce a product compound and a gap between the first material and the second material.
4. The method according to claim 3 , wherein the first material comprises silicon, the intermediate material comprises a metal and the product compound comprises a silicide.
5. The method according to claim 4 , wherein the metal is selected from the group consisting of Ni, Ti, Pt, Co and Mo.
6. The method according to claim 3 , wherein the second material is selected from the group consisting of an oxide, silicon and a metal.
7. The method according to claim 3 , wherein the conditions comprise subjecting the structure to a temperature ranging from 150 to 1000° C. for two minutes or less.
8. The method according to claim 3 , wherein the gap has an aspect ratio of 250:1 or more.
9. The method according to claim 3 , wherein the structure is a micron-scaled structure or a nano-scaled structure.
10. A method of producing a capacitive piezoelectric transducer, the method comprising:
providing a layered substrate comprising:
a base layer;
a first electrode disposed on the base layer;
a first layer disposed on the first electrode;
a piezoelectric layer disposed on the first layer;
a second layer disposed on the piezoelectric layer; and
a second electrode disposed on the second layer; and
releasing the piezoelectric layer, such that the first electrode is spaced apart from the piezoelectric layer by a first distance and the second electrode is spaced apart from the piezoelectric layer by a second distance.
11. The method of claim 10 , wherein the releasing comprises:
subjecting the layered substrate to conditions sufficient for at least a portion of the first layer and the first electrode to react to produce a first product compound and a first gap between the first electrode and the piezoelectric layer, and for at least a portion of the second layer and the second electrode to react to produce a second product compound and a second gap between the second electrode and the piezoelectric layer.