Chip comprising a fill structure
A chip includes a dielectric layer and a fill structure in the dielectric layer, wherein the fill structure extends along a dicing edge of the chip, with the fill structure abutting the dicing edge.
1. A chip comprising a dielectric layer and a fill structure in the dielectric layer, wherein the fill structure extends along a dicing edge of the chip, with the fill structure abutting the dicing edge,
wherein a chip area of the chip is smaller than 10 mm 2 ,
wherein the fill structure forms a periodic structure having a periodicity with a periodic pitch in a lateral dimension parallel to and/or perpendicular to the dicing edge, and wherein the periodic pitch is smaller than 5 μm.
2. The chip according to claim 1 , wherein the dicing edge is straight and the fill structure abuts the dicing edge along an entire length of the dicing edge.
3. The chip according to claim 1 , wherein the chip comprising four dicing edges surrounding a chip area, wherein the dicing edge is straight and the fill structure abuts the dicing edge along an entire length of the dicing edge.
4. The chip according to claim 1 , wherein the fill structure comprises metal, oxide and/or polysilicon.
5. The chip according to claim 1 , wherein the periodic structure is formed by a grid of metal vias or metal conductor line fragments.
6. The chip according to claim 1 , wherein the periodic structure is formed by a plurality of metal, oxide and/or polysilicon layers extending within the dielectric layer and/or within an insulating layer.
7. The chip according to claim 6 , wherein the metal, oxide and/or polysilicon layers comprise interconnecting lines formed within the chip in order to connect logic elements.
8. The chip according to claim 1 , wherein the chip comprises a sealing ring which extends in parallel to the dicing edge within the dielectric layer.
9. The chip according to claim 1 , wherein the dielectric layer has a dielectric constant smaller than 3.9.
10. The chip according to claim 1 , wherein average half-pitch of the chip is smaller than 65 nm.
11. The chip according to claim 1 , wherein the dicing edge extends straightly along a direction defined by a grid of the periodic fill structure.
12. A chip comprising a dielectric layer having a dielectric constant smaller than 3.9 and a fill structure in the dielectric layer,
wherein the fill structure extends along a dicing edge of the chip, with the fill structure abutting the dicing edge along an entire length of the dicing edge, and
wherein the fill structure forms a periodic structure having a periodic pitch which is smaller than 5 μm.
13. A wafer comprising a plurality of chip areas separated by at least a dicing line,
wherein the wafer comprises a dielectric layer, and
wherein the dielectric layer comprises a fill structure within the dicing line having a width of which is smaller than 25 μm,
wherein the fill structure forms a periodic structure having a periodic pitch which is smaller than 5 μm and which extends in a lateral dimension parallel and perpendicular to the dicing line, and
wherein the fill structure laterally occupies more than 25% of the dicing line.
14. The wafer according to claim 13 , wherein the periodic structure is formed by a grid of metal vias or metal conductor line fragments.
15. The wafer according to claim 13 , wherein the periodic structure is formed by a plurality of metal, oxide and/or polysilicon layers extending within the dielectric layer and/or within an insulating layer.
16. The wafer according to claim 13 , wherein the fill structure comprises metal, oxide and/or polysilicon.
17. The wafer according to claim 13 , wherein the fill structure comprises a density of metal of at least 10%.
18. The wafer according to claim 13 , wherein the chip areas are smaller than 3 mm 2 .
19. The wafer according to claim 13 , wherein the dielectric layer has a dielectric constant smaller than 3.9.