Piezoelectric device, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus
A piezoelectric device includes a first electrode and a facing second electrode, with a piezoelectric layer therebetween. The first electrode includes a first conductive layer, a first intermediate layer that contacts the first conductive layer, a second intermediate layer that contacts the first intermediate layer, and a second conductive layer that contacts the second intermediate layer and the piezoelectric layer. The first conductive layer contains a metal and an alloy. The metal is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Cu, Ag, or Au, and the alloy contains at least one of the foregoing metals. The first intermediate layer contains a nitrogen compound. The second intermediate layer contains a metal and an alloy. The metal is Ti, Zr, W, Ta, or Al, and the alloy contains at least two of the foregoing metals. The second conductive layer contains a conductive oxide.
1. A piezoelectric device comprising:
a first electrode;
a second electrode provided so as to face the first electrode; and
a piezoelectric layer disposed between the first electrode and the second electrode, wherein:
the first electrode includes a first conductive layer, a first intermediate layer provided so as to be in contact with the first conductive layer, a second intermediate layer provided so as to be in contact with the first intermediate layer, and a second conductive layer provided so as to be in contact with the second intermediate layer and the piezoelectric layer,
the first conductive layer contains at least one metal and/or an alloy, the one metal being selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Cu, Ag, and Au, and the alloy containing at least one metal selected from the group;
the first intermediate layer contains a nitrogen compound;
wherein the first intermediate layer deters movement of oxygen and moisture into the first conductive layer;
the second intermediate layer contains at least one metal and an alloy, the one metal being selected from the group consisting of Ti, Zr, W, Ta, and Al, and the alloy containing at least two metals selected from the group;
wherein the second intermediate layer promotes adherence between the first intermediate layer and the second conductive layer; and
the second conductive layer contains a conductive oxide.
2. The piezoelectric device according to claim 1 , wherein the first intermediate layer contains a nitrogen compound containing at least one metal selected from the group consisting of Ti, Al, Ta, W, and Si.
3. The piezoelectric device according to claim 1 , wherein the second conductive layer contains a conductive oxide containing at least one metal selected from the group consisting of La, Sr, Ca, In, Ni, Ru, and Sn.
4. The piezoelectric device according to claim 1 , wherein the first conductive layer contains at least one metal and/or an alloy, the one metal being selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Cu, Ag, and Au, and the alloy containing at least two metals selected from the group.
5. The piezoelectric device according to claim 1 , wherein the piezoelectric layer has a thickness in the range from 100 nm to 2000 nm.
6. The piezoelectric device according to claim 1 , wherein the first electrode conductive layer has a thickness in the range from 50 nm to 300 nm.
7. The piezoelectric device according to claim 1 , wherein the first conductive layer has a thickness in the range from 10 nm to 300 nm.
8. The piezoelectric device according to claim 1 , wherein the first intermediate layer has a thickness in the range from 30 nm to 200 nm.
9. The piezoelectric device according to claim 1 , wherein the second intermediate layer has a thickness in the range from 1 nm to 20 nm.
10. The piezoelectric device according to claim 1 , wherein the second conductive layer has a thickness in the range from 20 nm to 60 nm.
11. The piezoelectric device according to claim 1 , wherein the second electrode layer has a thickness in the range from 50 nm to 300 nm.