Compound semiconductor epitaxial structure and method for fabricating the same
A method for fabricating a compound semiconductor epitaxial structure includes the following steps. Firstly, a first compound epitaxial layer is formed on a substrate. Then, a continuous epitaxial deposition process is performed to form a second compound epitaxial layer on the first compound epitaxial layer, so that the second compound epitaxial layer has a linearly-decreased concentration gradient of metal. Afterwards, a semiconductor material layer is formed on the second compound epitaxial layer.
1. A method for fabricating a compound semiconductor epitaxial structure, comprising steps of:
forming an undoped silicon germanium layer having a linearly-increased concentration gradient of germanium on a substrate;
forming a first compound epitaxial layer on the undoped silicon germanium layer;
performing a continuous epitaxial deposition process to form a second compound epitaxial layer on the first compound epitaxial layer, so that the second compound epitaxial layer has a linearly-decreased concentration gradient of metal; and
forming a semiconductor material layer on the second compound epitaxial layer.
2. The method according to claim 1 , wherein the first compound epitaxial layer has a metal concentration greater than or equal to an initial concentration of the linearly-decreased concentration gradient of metal.
3. The method according to claim 1 , wherein during the step of performing the continuous epitaxial deposition process to form the second compound epitaxial layer, the flow rate of a metal-containing reactive gas is controlled to be linearly decreased.
4. The method according to claim 3 , wherein forming the second compound epitaxial layer further comprises keeping the flow rate of the metal-containing reactive gas constant for a predetermined interval of time.
5. The method according to claim 4 , wherein the first compound epitaxial layer is a silicon germanium bulk layer, and the metal-containing reactive gas comprises a germane gas.
6. The method according to claim 5 , wherein during the step of performing the continuous epitaxial deposition process to form the second compound epitaxial layer, adjusting the flow rates of the germane gas, a hydrogen chloride gas and a diborane gas using a mass flow controller, so that the flow rate of the germane gas is linearly decreased.
7. The method according to claim 5 , wherein the first compound epitaxial layer is further boron-doped.
8. The method according to claim 7 , wherein during the step of forming the undoped silicon germanium layer, adjusting the flow rates of the germane gas and a hydrogen chloride gas using a mass flow controller, so that the flow rate of the germane gas is linearly increased or is kept constant for a predetermined interval of time.
9. The method according to claim 1 , wherein the step of forming the first compound epitaxial layer and the step of forming the second compound epitaxial layer are carried out at the same temperature.
10. A compound semiconductor epitaxial structure, comprising:
a substrate;
a first compound epitaxial layer formed on a substrate;
an undoped silicon germanium layer having a linearly-increased concentration gradient of germanium arranged between the substrate and the first compound epitaxial layer;
a second compound epitaxial layer formed on the first compound epitaxial layer, wherein the second compound epitaxial layer has a linearly-decreased concentration gradient of metal; and
a semiconductor material layer formed on the second compound epitaxial layer.
11. The compound semiconductor epitaxial structure according to claim 10 , wherein the first compound epitaxial layer has a metal concentration greater than or equal to an initial concentration of the linearly-decreased concentration gradient of metal of the second compound epitaxial layer.
12. The compound semiconductor epitaxial structure according to claim 10 , wherein the first compound epitaxial layer is a silicon germanium bulk layer, which contains 40 wt % of germanium and is doped with 25 wt % of boron, wherein the second compound epitaxial layer has a linearly-decreased concentration gradient of germanium.
13. The compound semiconductor epitaxial structure according to claim 10 , wherein a top surface of the first compound epitaxial layer is higher than the substrate by a height difference.
14. The compound semiconductor epitaxial structure according to claim 13 , wherein the height difference between the top surface of the first compound epitaxial layer and the substrate is in a range between 150 Å and 170 Å.
15. The compound semiconductor epitaxial structure according to claim 10 , wherein the second compound epitaxial layer has a thickness smaller than 100 Å.
16. The compound semiconductor epitaxial structure according to claim 15 , wherein the thickness of the second compound epitaxial layer is in a range between 30 Å and 100 Å.