Pre-colored methodology of multiple patterning
Some embodiments relate to a method of pre-coloring word lines and control lines within an SRAM integrated chip design to avoid timing delays that result from processing variations introduced through multiple patterning lithography processes. The method is performed by generating a graphical IC layout file having an SRAM circuit with a plurality of word lines and Y-control lines. The word lines and Y-control lines are assigned a color during decomposition. The word lines and Y-control lines are further pre-colored in a manner that deliberately assigns the pre-colored data to a same mask. Therefore, during mask building, data associated with pre-colored word and Y-control lines is sent to a same mask, regardless of the colors that are assigned to the data. By assigning word and Y-control lines to a same mask through pre-coloring, processing variations between the word and Y-control lines are minimized, thereby mitigating timing variations in an SRAM circuit.
1. A method for pre-coloring IC layout data for a multiple patterning lithography process, comprising:
generating a graphical IC layout file using a computing device, wherein the graphical IC layout file comprises a plurality of IC shapes comprising a plurality of word lines and a plurality of Y-control lines within an SRAM memory circuit, wherein the plurality of Y-control lines are oriented in parallel with the plurality of word lines;
pre-coloring selective IC shapes using the computing device;
operating a decomposition algorithm using the computing device, wherein the decomposition algorithm assigns two or more different colors to uncolored IC shapes, such that IC shapes assigned a same color are to be formed on a same mask of a multiple mask set used for the multiple patterning lithography process;
wherein the pre-colored IC shapes are to be formed on a same mask independent of the two or more different colors assigned by the decomposition algorithm;
wherein forming the pre-colored IC shapes on the same mask reduces processing variations between on-chip structures corresponding to the pre-colored IC shapes; and
wherein pre-coloring one or more of the word lines and Y-control lines comprises placing a pre-coloring marker shape on the one or more of the plurality of word lines and Y-control lines, which indicates that the one or more of the plurality of word lines and Y-control lines are to be formed on the same mask.
2. The method of claim 1 , further comprising:
restricting the placement of the pre-coloring marker shape by design rules that prevent placement of pre-coloring marker shape on lines having a spacing less than a design rule value.
3. The method of claim 1 , wherein pre-coloring one or more of the word lines and Y-control lines comprises assigning a pre-coloring color, not used in the decomposition, to the one or more of the plurality of word lines and Y-control lines, such that a total number of colors assigned to the graphical IC layout file is greater than a number of masks in the multiple mask set.
4. The method of claim 1 , wherein the plurality of Y-control lines are configured to convey one or more of: a sense amplifier enable signal, a Y-address decoding signal, a read or write enable signal, and a bit line pre-charge signal.
5. The method of claim 1 , wherein pre-coloring the plurality of word lines and Y-control lines is performed after operating the decomposition algorithm.
6. The method of claim 1 , wherein pre-coloring the plurality of word lines and Y-control lines is performed prior to operating the decomposition algorithm.
7. The method of claim 1 , wherein the graphical IC layout file comprises a GDS file.
8. A method for pre-coloring IC layout data for a multiple patterning lithography process, comprising:
generating a graphical IC layout file using a computing device, wherein the graphical IC layout file comprises a plurality of IC shapes comprising a plurality of word lines and a plurality of Y-control lines within an SRAM memory circuit, wherein the plurality of Y-control lines are oriented in parallel with the plurality of word lines;
pre-coloring selective IC shapes using the computing device;
operating a decomposition algorithm using the computing device, wherein the decomposition algorithm assigns two or more different colors to uncolored IC shapes, such that IC shapes assigned a same color are to be formed on a same mask of a multiple mask set used for the multiple patterning lithography process;
wherein the pre-colored IC shapes are to be formed on a same mask independent of the two or more different colors assigned by the decomposition algorithm;
wherein forming the pre-colored IC shapes on the same mask reduces processing variations between on-chip structures corresponding to the pre-colored IC shapes; and
wherein pre-coloring the plurality of word lines and Y-control lines is performed prior to operating the decomposition algorithm.
9. The method of claim 8 , wherein pre-coloring one or more of the word lines and Y-control lines comprises placing a pre-coloring marker shape on the one or more of the plurality of word lines and Y-control lines, which indicates that the one or more of the plurality of word lines and Y-control lines are to be formed on the same mask.
10. The method of claim 9 , further comprising:
restricting the placement of the pre-coloring marker shape by design rules that prevent placement of pre-coloring marker shape on lines having a spacing less than a design rule value.
11. The method of claim 8 , wherein pre-coloring one or more of the word lines and Y-control lines comprises assigning a pre-coloring color, not used in the decomposition, to the one or more of the plurality of word lines and Y-control lines, such that a total number of colors assigned to the graphical IC layout file is greater than a number of masks in the multiple mask set.
12. The method of claim 8 , wherein the plurality of Y-control lines are configured to convey one or more of: a sense amplifier enable signal, a Y-address decoding signal, a read or write enable signal, and a bit line pre-charge signal.
13. The method of claim 8 , wherein the graphical IC layout file comprises a GDS file.
14. A method for pre-coloring IC layout data for a multiple patterning lithography process, comprising:
generating a graphical IC layout file using a computing device, wherein the graphical IC layout file comprises a plurality of IC shapes comprising a plurality of word lines and a plurality of Y-control lines within an SRAM memory circuit, wherein the plurality of Y-control lines are oriented in parallel with the plurality of word lines;
pre-coloring selective IC shapes using the computing device;
operating a decomposition algorithm using the computing device, wherein the decomposition algorithm assigns two or more different colors to uncolored IC shapes, such that IC shapes assigned a same color are to be formed on a same mask of a multiple mask set used for the multiple patterning lithography process;
wherein the pre-colored IC shapes are to be formed on a same mask independent of the two or more different colors assigned by the decomposition algorithm;
wherein forming the pre-colored IC shapes on the same mask reduces processing variations between on-chip structures corresponding to the pre-colored IC shapes; and
wherein pre-coloring the plurality of word lines and Y-control lines is performed after operating the decomposition algorithm.
15. The method of claim 14 , wherein pre-coloring one or more of the word lines and Y-control lines comprises placing a pre-coloring marker shape on the one or more of the plurality of word lines and Y-control lines, which indicates that the one or more of the plurality of word lines and Y-control lines are to be formed on the same mask.
16. The method of claim 15 , further comprising:
restricting the placement of the pre-coloring marker shape by design rules that prevent placement of pre-coloring marker shape on lines having a spacing less than a design rule value.
17. The method of claim 14 , wherein pre-coloring one or more of the word lines and Y-control lines comprises assigning a pre-coloring color, not used in the decomposition, to the one or more of the plurality of word lines and Y-control lines, such that a total number of colors assigned to the graphical IC layout file is greater than a number of masks in the multiple mask set.
18. The method of claim 14 , wherein the plurality of Y-control lines are configured to convey one or more of: a sense amplifier enable signal, a Y-address decoding signal, a read or write enable signal, and a bit line pre-charge signal.
19. The method of claim 14 , wherein the graphical IC layout file comprises a GDS file.