System-in-package platform for electronic-microfluidic devices
An integrated electronic-micro fluidic device an integrated electronic-micro fluidic device, comprising a semiconductor substrate on a first support, an electronic circuit on a first semiconductor-substrate side of the semiconductor substrate, and a signal interface structure to an external device. A micro fluidic structure is formed in the semiconductor substrate, and is configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away from the first support.
1. An assembly comprising an integrated electronic-microfluidic device at is mounted on a circuit board,
the integrated electronic-microfluidic device comprising:
a semiconductor substrate on a first support;
an electronic circuit on a first semiconductor-substrate side of the semiconductor substrate;
a signal interface structure to an external device, the signal interface structure being arranged on the first semiconductor-substrate side and configured to receive electrical signals from the electronic circuit;
a microfluidic structure formed in the semiconductor substrate, the microfluidic structure being configured to confine a flow of a fluid including to and from the microfluidic structure to only a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away from the first support;
a second support on the second semiconductor-substrate side, the second support having an opening that allows a flow of the fluid to and from the microfluidic structure;
wherein the external-contact elements of the integrated electronic-microfluidic device are connected to contact structures on the circuit board.
2. The assembly of claim 1 , wherein an electrically isolating underfilling layer is arranged in a spacing between the circuit board and the electronic-microfluidic device and configured to prevent a penetration of a fluid into the spacing.
3. The assembly of claim 1 , wherein contact structures are arranged on one side of the circuit board and electrically connected to electronic circuits that are provided on an opposite side of the circuit board.
4. An assembly comprising an integrated electronic-microfluidic device that is mounted on a circuit board,
the integrated electronic-microfluidic device comprising:
a semiconductor substrate on a first support;
an electronic circuit on a first semiconductor-substrate side of the semiconductor substrate;
a signal interface structure to an external device, the signal interface structure being arranged on the first semiconductor-substrate side and configured to receive electrical signals from the electronic circuit;
a microfluidic structure formed in the semiconductor substrate, the microfluidic structure being configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away from the first support;
a second support on the second semiconductor-substrate side, the second support having an opening that allows a flow of the fluid to and from the microfluidic structure; and
an electrically isolating underfilling layer arranged in a spacing between the circuit board and the electronic-microfluidic device and configured to prevent a penetration of a fluid into the spacing,
wherein the external-contact elements of the integrated electronic-fluidic device are connected to contact structures on the circuit board.
5. An assembly comprising an irate rated electronic-microfluidic device that is mounted on a circuit board,
the integrated electronic-microfluidic device comprising:
a semiconductor substrate on a first support;
an electronic circuit on a first semiconductor-substrate side of the semiconductor substrate;
a signal interface structure to an external device, the signal interface structure being arranged on the first semiconductor-substrate side and configured to receive electrical signals from the electronic circuit;
a microfluidic structure formed in the semiconductor substrate, the microfluidic structure being configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away from the first support;
a second support on the second semiconductor-substrate side, the second support having an opening that allows a flow of the fluid to and from the microfluidic structure; and
contact structures arranged on one side of the circuit board and electrically connected to electronic circuits that are provided on an opposite side of the circuit board,
wherein the external-contact elements of the integrated electronic-microfluidic device are connected to contact structures on the circuit board.